公开(公告)号：AU6971898A

公开(公告)日：1998-12-08

申请号：AU6971898

申请日：1998-04-14

Applicant: INTEL CORP

Inventor： WINER PAUL ,  PANICCIA MARIO J ,  MA KARL J

IPC: G01R31/26 ,  H01L23/467 ,  H01L23/473 ,  H01L23/34

Abstract: A method and an apparatus for cooling a semiconductor die. In one embodiment, a C4 packaged semiconductor die is thermally coupled to a cooling plate having an opening. The opening of the cooling plate is disposed over a back side surface of the semiconductor die such that direct unobstructed access to the exposed back side surface of the semiconductor die is provided. A conformable thermal conductor, such as indium, is disposed between the semiconductor die and the cooling plate to improve the thermal coupling between the semiconductor and cooling plate. In one embodiment, the semiconductor die is mounted on a circuit board and a cooling block is disposed on the opposite side of the circuit board. The cooling plate is thermally coupled to the cooling block with heat transfer conduits, such as thermal screws, that extend through the circuit board to transfer the heat from the semiconductor die through the cooling plate through the heat transfer conduits to the cooling block located on the opposite side of the circuit board. In one embodiment, coolant is circulated through the cooling block to remove heat from the cooling block.

公开(公告)号：MY114590A

公开(公告)日：2002-11-30

申请号：MYPI19982128

申请日：1998-05-13

Applicant: INTEL CORP

Inventor： MA KARL J ,  PANICCIA MARIO J ,  WINER PAUL

IPC: G01R31/26 ,  H01L23/34 ,  H01L23/10 ,  H01L23/467 ,  H01L23/473

Abstract: A METHOD AND AN APPARATUS FOR COOLING A SEMICONDUCTOR DIE. IN ONE EMBODIMENT, A C4 PACKAGED SEMICONDUCTOR DIE (301) IS THERMALLY COUPLED TO A COOLING PLATE (313) HAVING AN OPENING (315). THE OPENING OF THE COOLING PLATE IS DISPOSED OVER A BACK SIDE SURFACE (311) OF THE SEMICONDUCTOR DIE (301) SUCH THAT DIRECT UNOBSTRUCTED ACCESS TO THE EXPOSED BACK SIDE SURFACE OF THE SEMICONDUCTOR DIE IS PROVIDED. A CONFORMABLE THERMAL CONDUCTOR, SUCH AS INDIUM (317), IS DISPOSED BETWEEN THE SEMICONDUCTOR DIE (301) AND THE COOLING PLATE (313) TO IMPROVE THE THERMAL COUPLING BETWEEN THE SEMICONDUCTOR AND COOLING PLATE. IN ONE EMBODIMENT, THE SEMICONDUCTOR DIE IS MOUNTED ON A CIRCUIT BOARD (307) AND A COOLING BLOCK (319) IS DISPOSED ON THE OPPOSITE SIDE OF THE CIRCUIT HOARD (307). THE COOLING PLATE (513) IS THERMALLY COUPLED TO THE COOLING BLOCK (519) WITH HEAT TRANSFER CONDUITS (523A & 523B), SUCH AS THERMAL SCREWS, THAT EXTEND THROUGH THE CIRCUIT BOARD (507) TO TRANSFER THE HEAT FROM THE SEMICONDUCTOR DIE (501) THROUGH THE COOLING PLATE THROUGH THE HEAT TRANSFER CONDUITS TO THE COOLING BLOCK LOCATED ON THE OPPOSITE SIDE OF THE CIRCUIT BOARD. IN ONE EMBODIMENT, COOLANT IS CIRCULATED THROUGH THE COOLING BLOCK TO REMOVE HEAT FROM THE COOLING BLOCK. (FIGURE 3)