公开(公告)号：EP1510864A2

公开(公告)日：2005-03-02

申请号：EP04026039.0

申请日：2000-07-13

Applicant: Input/Output, Inc.

Inventor： Yu, Lianzhong ,  Ried, Robert P. ,  Goldberg, Howard D. ,  Yu, Duli

IPC: G03F7/00

CPC classification number: G02B26/0816 ,  B81B2201/042 ,  B81C1/00396 ,  B81C2201/0132 ,  B81C2201/0133 ,  B81C2203/0109 ,  C23F1/02

Abstract: The present invention provides merged-mask processes for fabricating micromachined devices in general and mirrored assemblies for use in optical scanning devices in particular. A method of fabricating a three dimensional structure, comprising, providing a substrate, applying a layer of a first masking material onto the substrate, applying a layer of a second masking material onto the layer of the first masking material, patterning the layer of the second masking material, applying a layer of a third masking material onto the portions not covered by the patterned layer of the second masking material, the layer of the third masking material is at least as thick as the combined thickness of the layers of the first and second masking materials, patterning the layers of the first and third masking materials, etching the exposed portions of the substrate, etching the exposed portions of the layers of the first and third masking materials and etching the exposed portions of the substrate.

公开(公告)号：EP1305639A1

公开(公告)日：2003-05-02

申请号：EP01939582.1

申请日：2001-05-29

Applicant: Input/Output, Inc.

Inventor： Ried, Robert P. ,  Selvakumar, Arjun ,  Goldberg, Howard D. ,  Schmidt, Martin A. ,  Yu, Lianzhong

IPC: G01P15/00

CPC classification number: G01V1/181 ,  G01P15/0802 ,  G01P15/125

Abstract: An accelerometer (305) which comprises a measurement mass assembly having top capacitor electrode (705), with one or more re-entrant openings or grooves (1405), a bottom capacitor electrode (805), with one or more re-entrant openings (1410), and/or a mass electrode pattern (910, 915), which also includes one or more re-entrant openings or grooves (1415, 1420). A re-entrant opening or groove is an opening or groove formed in an element whereby the opening or groove is larger toward the center of the element than at the surface of the element. Re-entrant openings or grooves (1405, 1410, 1415, 1420) reduce fluid damping thereby reducing the amount of thermo-mechanical noise and permit increased sealing pressure of the accelerometer (305) thereby lowering manufacturing costs and increasing production yields.

Abstract translation: 包括具有顶部电容器电极（705），一个或多个凹入开口或凹槽（1405），底部电容器电极（805）的测量质量组件的加速度计（305），具有一个或多个凹入开口 和/或质量电极图案（910,915），其还包括一个或多个凹入开口或凹槽（1415,1420）。 凹入开口或凹槽是在元件中形成的开口或凹槽，由此开口或凹槽朝向元件的中心比在元件的表面处更大。 凹入开口或凹槽（1405,1410,1415,1420）减少流体阻尼，从而减少热机械噪声的量并允许加速度计（305）的增加的密封压力，从而降低制造成本并提高产量。