公开(公告)号：US20230072991A1

公开(公告)日：2023-03-09

申请号：US17939309

申请日：2022-09-07

Applicant: JEOL Ltd.

Inventor： Hiroki Hashiguchi ,  Kazuki Yagi ,  Ruth Shewmon Bloom ,  Bryan W. Reed

IPC: H01J37/04 ,  H01J37/28 ,  G01N23/04

Abstract: A charged particle beam device scans a specimen with a charged particle beam and generates an image based on a detected signal from a detector that detects a signal generated from the specimen based on the scan performed by the charged particle beam. The charged particle beam device includes: a blanker that performs blanking of the charged particle beam; an image acquisition unit that acquires a plurality of images by controlling the blanking during the scan performed by the charged particle beam, the plurality of images including pixels corresponding to a region of the specimen that is irradiated with the charged particle beam and pixels corresponding to a region of the specimen that is not irradiated with the charged particle beam; and an integrated image generation unit that generates an integrated image by integrating the plurality of acquired images.