公开(公告)号：US20230072991A1

公开(公告)日：2023-03-09

申请号：US17939309

申请日：2022-09-07

Applicant: JEOL Ltd.

Inventor： Hiroki Hashiguchi ,  Kazuki Yagi ,  Ruth Shewmon Bloom ,  Bryan W. Reed

IPC: H01J37/04 ,  H01J37/28 ,  G01N23/04

Abstract: A charged particle beam device scans a specimen with a charged particle beam and generates an image based on a detected signal from a detector that detects a signal generated from the specimen based on the scan performed by the charged particle beam. The charged particle beam device includes: a blanker that performs blanking of the charged particle beam; an image acquisition unit that acquires a plurality of images by controlling the blanking during the scan performed by the charged particle beam, the plurality of images including pixels corresponding to a region of the specimen that is irradiated with the charged particle beam and pixels corresponding to a region of the specimen that is not irradiated with the charged particle beam; and an integrated image generation unit that generates an integrated image by integrating the plurality of acquired images.

公开(公告)号：US11676796B2

公开(公告)日：2023-06-13

申请号：US17472816

申请日：2021-09-13

Applicant: JEOL Ltd.

Inventor： Kazuki Yagi ,  Yu Jimbo ,  Bryan W. Reed ,  Ruth Shewmon Bloom

IPC: H01J37/28 ,  H01J37/04 ,  H01J37/147 ,  H01J37/244

CPC classification number: H01J37/28 ,  H01J37/045 ,  H01J37/1477 ,  H01J37/244 ,  H01J2237/24415

Abstract: A charged particle beam device including: a charged particle beam source which emits a charged particle beam; a blanking device which has an electrostatic deflector that deflects and blocks the charged particle beam; an irradiation optical system which irradiates a specimen with the charged particle beam; and a control unit which controls the electrostatic deflector, the control unit performing processing of: acquiring a target value of a dose of the charged particle beam for the specimen; setting a ratio A/B of a time A during which the charged particle beam is not blocked to a unit time B (where A≠B, A≠0), based on the target value; and operating the electrostatic deflector based on the ratio.

公开(公告)号：US20220084783A1

公开(公告)日：2022-03-17

申请号：US17472816

申请日：2021-09-13

Applicant: JEOL Ltd.

Inventor： Kazuki Yagi ,  Yu Jimbo ,  Bryan W. Reed ,  Ruth Shewmon Bloom

IPC: H01J37/28 ,  H01J37/04 ,  H01J37/147 ,  H01J37/244

Abstract: A charged particle beam device including: a charged particle beam source which emits a charged particle beam; a blanking device which has an electrostatic deflector that deflects and blocks the charged particle beam; an irradiation optical system which irradiates a specimen with the charged particle beam; and a control unit which controls the electrostatic deflector, the control unit performing processing of: acquiring a target value of a dose of the charged particle beam for the specimen; setting a ratio A/B of a time A during which the charged particle beam is not blocked to a unit time B (where A≠B, A≠0), based on the target value; and operating the electrostatic deflector based on the ratio.