公开(公告)号：JP2002244295A

公开(公告)日：2002-08-30

申请号：JP2001039066

申请日：2001-02-15

Applicant: JSR CORP

Inventor： KATAOKA ATSUKO ,  YAMAMOTO SHIGEHIRO ,  NISHIMURA YUKIO ,  KAJITA TORU

IPC: G03F7/039 ,  C08K5/00 ,  C08L101/02 ,  G03F7/38

Abstract: PROBLEM TO BE SOLVED: To provide a solution of a radiation sensitive resin composition having a controlled low water content, not causing the hydrolysis of a carboxylic anhydride structure in the resin and excellent in long-term shelf stability and to provide a method for improving the shelf stability of a solution of a radiation sensitive resin composition containing a resin having a carboxylic anhydride structure. SOLUTION: The solution of a radiation sensitive resin composition contains (A) an acid dissociable group-containing resin having a carboxylic anhydride structure and made alkali-soluble when the acid dissociable group is dissociated and (B) a radiation sensitive acid generating agent and has