公开(公告)号：DE602004027183D1

公开(公告)日：2010-07-01

申请号：DE602004027183

申请日：2004-03-25

Applicant: JSR CORP ,  SHARP KK

Inventor： YOKOYAMA YASUAKI ,  YONEKURA ISAMU ,  SATOH TAKASHI ,  WAKASAKI TAMAKI ,  TAKEUCHI YASUMASA ,  ENDO MASAYUKI

IPC: C23C18/02 ,  H01B1/22 ,  C23C18/06 ,  C23C18/08 ,  C23C18/10 ,  C23C18/14 ,  H01L21/288

公开(公告)号：AU2401502A

公开(公告)日：2002-06-03

申请号：AU2401502

申请日：2001-11-07

Applicant: JSR CORP

Inventor： SHIHO HIROSHI ,  KATO HITOSHI ,  OKADA SACHIKO ,  YONEKURA ISAMU ,  MATSUKI YASUO

IPC: C01G35/00 ,  C23C18/12 ,  H01L21/314 ,  H01L21/316

Abstract: A composition for forming a high-quality tantalum film which is advantageously used as an capacitor insulating film and a process for forming the high-quality tantalum film. The composition for forming a tantalum oxide film, which comprises at least one tantalum compound selected from the group consisting of a reaction product of a compound capable of reacting with a tantalum alkoxide and a tantalum alkoxide and a hydrolyzate of the reaction product, and a solvent, and the process for forming the tantalum oxide film by applying this composition to a substrate and heating it.

公开(公告)号：SG122899A1

公开(公告)日：2006-06-29

申请号：SG200507079

申请日：2005-11-17

Applicant: JSR CORP

Inventor： ICHINOHE DAIGO ,  NISHIO TOSHIHIRO ,  HAMAGUCHI HITOSHI ,  IWABUCHI TOMOKO ,  YONEKURA ISAMU ,  KAJITA TORU

公开(公告)号：JP2007246585A

公开(公告)日：2007-09-27

申请号：JP2006068669

申请日：2006-03-14

Applicant: Jsr Corp ,  Jsr株式会社

Inventor： YONEKURA ISAMU ,  ICHINOHE DAIGO ,  NISHIO HISAHIRO ,  SHIHO KOUJI

IPC: C08F8/30 ,  C08F220/04 ,  C08F220/28 ,  C08F220/30 ,  C08F222/04 ,  C08F290/12 ,  G02F1/1339 ,  G03F7/027

Abstract: PROBLEM TO BE SOLVED: To provide a radiation sensitive resin composition having a high sensitivity, capable of obtaining a sufficient spacer form even by ≤1,200 J/m 2 exposure, excellent in flexibility, high recovery rate, rubbing resistance, close adhesion with a transparent substrate plate, heat resistance, etc., further excellent in developing property on spacer-patterning and capable of forming the spacer for a liquid crystal-displaying element. SOLUTION: This radiation sensitive resin composition comprises [A] a polymer obtained by reacting a (meth)acryloyloxyalkylisocyanate compound with a copolymer of an unsaturated carboxylic acid and/or unsaturated carboxylic acid anhydride, a hydroxyphenyl group-containing unsaturated compound and another unsaturated compound other than the above unsaturated compounds, [B] a polymerizable unsaturated compound and [C] a radiation sensitive polymerization initiator. COPYRIGHT: (C)2007,JPO&INPIT

Abstract translation: 要解决的问题：为了提供具有高灵敏度的辐射敏感性树脂组合物，能够获得足够的间隔物形式，即使≤1,200J/ m 2＆lt; SP＆gt;曝光，柔性优异，回收率高 速率，耐摩擦性，与透明基板的紧密粘合性，耐热性等，在间隔物图案化上的显影性能更好，能够形成用于液晶显示元件的间隔物。 解决方案：该辐射敏感性树脂组合物包含[A]通过使（甲基）丙烯酰氧基烷氧基异氰酸酯化合物与不饱和羧酸和/或不饱和羧酸酐的共聚物，含羟基苯基的不饱和化合物与另一种 不饱和化合物，[B]可聚合不饱和化合物和[C]辐射敏感聚合引发剂。 版权所有（C）2007，JPO＆INPIT

公开(公告)号：JP2005206925A

公开(公告)日：2005-08-04

申请号：JP2004017238

申请日：2004-01-26

Applicant: Jsr Corp ,  Jsr株式会社

Inventor： YONEKURA ISAMU ,  YOKOYAMA YASUAKI ,  SAKAI TATSUYA ,  MATSUKI YASUO

IPC: C23C18/08 ,  C23C18/10 ,  C23C18/14 ,  C23C18/52 ,  H01L21/288

Abstract: PROBLEM TO BE SOLVED: To provide an electrically conductive stacked film easily and inexpensively usable for the wiring and electrode of many electronic devices, to provide a method of forming the same, and to provide wiring and an electrode obtained by using the same.
SOLUTION: The electrically conductive stacked film is obtained by stacking a metal aluminum film and an electrically conductive film comprising metal selected from the group consisting of molybdenum, tungsten and tantalum, and carbon. The electrode or wiring of an electronic device is obtained by using the same. In the method of forming an electrically conductive film, an organic metal complex of metal selected from the group consisting of molybdenum, tungsten and tantalum is applied to the surface of a substrate, next, heat treatment is performed to form an electrically conductive film, then, a complex of an amine compound and alane (aluminum hydride) is applied to the surface of the electrically conductive film, and next, heat and/optical treatment is performed to form a metal aluminum film.
COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：为了提供容易且廉价地用于许多电子器件的布线和电极的导电叠层膜，以提供其形成方法，并且提供布线和使用该导线的电极 。 解决方案：导电性叠层膜通过层叠金属铝膜和包含选自钼，钨和钽的金属和碳的金属的导电膜而获得。 通过使用电子装置的电极或布线来获得。 在形成导电膜的方法中，将选自钼，钨和钽的金属的有机金属络合物施加到基板的表面，接下来进行热处理以形成导电膜，然后 ，将胺化合物和丙烯（氢化铝）的配合物涂布在导电膜的表面，接着进行热处理和/光学处理，形成金属铝膜。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：JP2003100741A

公开(公告)日：2003-04-04

申请号：JP2001297106

申请日：2001-09-27

Applicant: JSR CORP

Inventor： YONEKURA ISAMU ,  OKADA SACHIKO ,  KATO HITOSHI ,  SHIHO KOUJI

IPC: C08K5/06 ,  C08G79/00 ,  C08L85/00 ,  H01L21/316 ,  H01L21/8242 ,  H01L27/108

Abstract: PROBLEM TO BE SOLVED: To provide a composition for forming a high quality tantalum oxide film, having little leakage current using a simple coating method, and to provide a forming method for the tantalum oxide film. SOLUTION: The composition includes (a1) tantalum alkoxide, (a2) a reaction product with at least one compound selected from amino alcohol, a compound having 2 hydroxide groups or more in its molecule (except amino alcohols), β-diketone, β-keto ester, β-dicarboxylic acid ester, lactic acid, ethyl lactate and 1,5-cyclooctadiene and [B] orthocarboxylic acid ester. The tantalum oxide film is formed, by coating the composition on a substrate and treating it with heat or/and by light.

公开(公告)号：JP2007065607A

公开(公告)日：2007-03-15

申请号：JP2005325817

申请日：2005-11-10

Applicant: Jsr Corp ,  Jsr株式会社

Inventor： ICHINOHE DAIGO ,  NISHIO HISAHIRO ,  HAMAGUCHI HITOSHI ,  IWABUCHI TOMOKO ,  YONEKURA ISAMU ,  KAJITA TORU

IPC: G03F7/031 ,  G02F1/1339 ,  G03F7/033

Abstract: PROBLEM TO BE SOLVED: To provide a photosensitive resin composition capable of faithfully reproducing the design size of a mask pattern with high sensitivity, superior in adhesion to a substrate, capable of giving satisfactory spacer shape and film thickness with an exposure energy of ≤1,500 J/m 2 , superior also in strength and heat resistance, excellent in controllability of spacer shape and film thickness in a low exposure energy region, less liable to generate foreign substances during the storage period and during use, and capable of forming spacers for a display panel that is superior in process stability and temporal stability, and to provide spacers for a display panel and a display panel. SOLUTION: The photosensitive resin composition contains [A] a copolymer of (a1) an ethylenically unsaturated carboxylic acid and/or an ethylenically unsaturated carboxylic acid anhydride and (a2) another ethylenically unsaturated compound, [B] a polymerizable compound having an ethylenically unsaturated bond, and [C] an o-acyloxime type photopolymerization initiator. COPYRIGHT: (C)2007,JPO&INPIT

Abstract translation: 要解决的问题：提供一种能够以高灵敏度忠实地再现掩模图案的设计尺寸的感光性树脂组合物，其对基材的粘附性优异，能够以曝光能量赋予令人满意的间隔物形状和膜厚度 ≤1,500J/ m 2 ，在强度和耐热性方面也优异，在低曝光能量区域中间隔物形状和膜厚度的可控性优异，在储存期间和期间不太可能产生异物 使用并且能够形成用于显示面板的间隔物，该显示面板的工艺稳定性和时间稳定性优异，并且为显示面板和显示面板提供间隔物。 解决方案：感光性树脂组合物含有[a1]烯键式不饱和羧酸和/或烯属不饱和羧酸酐的共聚物和（a2）另一种烯属不饱和化合物，[B]具有 烯键式不饱和键，和[C]邻酰肟型光聚合引发剂。 版权所有（C）2007，JPO＆INPIT

公开(公告)号：JP2007056221A

公开(公告)日：2007-03-08

申请号：JP2005246595

申请日：2005-08-26

Applicant: Jsr Corp ,  Jsr株式会社

Inventor： ICHINOHE DAIGO ,  YONEKURA ISAMU ,  SHIHO KOUJI

IPC: C08F8/30 ,  C08F290/12 ,  C08F299/00 ,  G03F7/027 ,  G03F7/40 ,  H01L21/027

Abstract: PROBLEM TO BE SOLVED: To provide a radiation-sensitive resin composition providing a sufficient spacer shape even by a little exposure, and enabling the spacer for a liquid crystal display element having excellent elastic recovery, rubbing resistance, adhesion to a transparent substrate, heat resistance or the like, and sufficiently exhibiting resistance to stripping liquid at stripping of an oriented film to be formed. SOLUTION: The polymer [A] is obtained by reacting a monoisocyanate compound containing a (meth)acryloyloxy group with a copolymer of (a1) an unsaturated carboxylic acid and/or an unsaturated carboxylic anhydride, (a2) an unsaturated compound having one or more hydroxy groups in one molecule, and (a3) other unsaturated compounds. The radiation-sensitive resin composition contains the polymer [A], a polymerizable unsaturated compound [B] and a radiation-sensitive polymerization initiator [C]. COPYRIGHT: (C)2007,JPO&INPIT

Abstract translation: 要解决的问题：为了提供即使通过少量暴露提供足够的间隔物形状的辐射敏感性树脂组合物，并且使得能够具有优异的弹性恢复，耐摩擦性，对透明基材的粘附性的液晶显示元件的间隔物 ，耐热性等，并且在剥离待形成的取向膜时充分显示剥离液的抗性。 解决方案：聚合物[A]是通过使含有（甲基）丙烯酰氧基的单异氰酸酯化合物与（a1）不饱和羧酸和/或不饱和羧酸酐的共聚物，（a2）不饱和化合物 一个分子中的一个或多个羟基，和（a3）其它不饱和化合物。 辐射敏感性树脂组合物含有聚合物[A]，可聚合不饱和化合物[B]和辐射敏感聚合引发剂[C]。 版权所有（C）2007，JPO＆INPIT

公开(公告)号：JP2005146308A

公开(公告)日：2005-06-09

申请号：JP2003382343

申请日：2003-11-12

Applicant: Jsr Corp ,  Jsr株式会社

Inventor： YOKOYAMA YASUAKI ,  YONEKURA ISAMU ,  OKADA SACHIKO ,  SAKAI TATSUYA ,  MATSUKI YASUO

IPC: B32B15/01 ,  C23C18/08 ,  C23C18/10 ,  C23C18/14 ,  H01L21/288 ,  H01L21/3205 ,  H01L23/52

Abstract: PROBLEM TO BE SOLVED: To provide an electroconductive laminated film which is simply and inexpensively usable for the electric wiring and electrode of many electron devices, and to provide a forming method therefor.
SOLUTION: The electroconductive laminated film is made of layered metallic aluminum films and ruthenium-containing electroconductive films. The electroconductive laminated film is formed by forming the electroconductive film by applying an organometal complex of ruthenium onto a substrate and subsequently heat-treating it, and forming the metallic aluminum film through applying the complex of an amine compound and an alane onto the electroconductive film and subsequently heating and/or optically treating it, or by sputtering or vapor-depositing aluminum.
COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：提供一种简单廉价地用于许多电子器件的电线和电极的导电层压膜，并提供其形成方法。 解决方案：导电层压膜由层状金属铝膜和含钌导电膜制成。 导电性层叠膜通过将钌的有机金属配合物涂布在基材上并随后进行热处理而形成导电膜而形成，并通过将胺化合物和丙烯的配合物涂布在导电膜上而形成金属铝膜， 随后加热和/或光学处理，或通过溅射或气相沉积铝。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：JP2005139090A

公开(公告)日：2005-06-02

申请号：JP2003375241

申请日：2003-11-05

Applicant: Jsr Corp ,  Jsr株式会社

Inventor： SAKAI TATSUYA ,  YONEKURA ISAMU ,  YOKOYAMA YASUAKI ,  MATSUKI YASUO

IPC: C07F11/00 ,  C23C16/18

Abstract: PROBLEM TO BE SOLVED: To provide a tungsten compound which can give good filmy metal tungsten in a safe process, can easily be handled in air, and is used for chemical gas phase growth, and to provide a method for producing a metal tungsten film from the same.
SOLUTION: This tungsten compound represented by formula (1): W(RCN)
n (CO)
6-n [R is a 1 to 10C hydrocarbon group or a 1 to 10C halogenated hydrocarbon group; (n) is an integer of 0 to 6, wherein a plurality of R groups may be identical to or different from each other, when (n) is an integer of 2 to 6], and the method for producing the metal tungsten film from the tungsten compound by a chemical gas phase growth method.
COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：为了提供在安全的工艺中可以得到良好的金属钨的钨化合物，可以容易地在空气中处理，并且用于化学气相生长，并且提供一种生产金属的方法 钨膜从同一个。 ＆lt; P＆gt;解决方案：由式（1）表示的钨化合物：W（RCN）（CO）6-n [R是1至10个烃基或 1〜10个卤代烃基; （n）为0〜6的整数，其中，当（n）为2〜6的整数时，多个R基彼此可以相同或不同，所述金属钨膜的制造方法为 钨化合物通过化学气相生长法。 版权所有（C）2005，JPO＆NCIPI