Abstract:
A radiation-sensitive resin composition is provided to obtain a shape and a film thickness of a spacer which is enough to exposure amount of 1,500 J/m^2 or less and has a sufficient process margin. A radiation-sensitive resin composition comprises (A) a copolymer of (a1) an ethylenically unsaturated carboxylic acid and/or an ethylenically unsaturated carboxylic anhydride, and (a2) other ethylenically unsaturated compound, (B) a polymerizable compound containing as main components, (b1) tri- or more functional (meth)acrylic acid esters and (b2) an ethylenically unsaturated compound other than (b1), and (C) a radiation-sensitive polymerization initiator. The method for forming a spacer for a LCD panel comprises the processes of: (a) forming a film of the above radiation-sensitive resin composition on a substrate, (b) exposing at least a part of the film, (c) developing the film after exposure, and (d) heating the film after development.
Abstract translation:提供了一种辐射敏感性树脂组合物,以获得足够暴露量为1,500J / m 2或更小并具有足够加工余量的间隔物的形状和膜厚。 辐射敏感性树脂组合物包含(A)(a1)烯属不饱和羧酸和/或烯属不饱和羧酸酐的共聚物和(a2)其它烯键式不饱和化合物,(B)以聚合物为主要成分, (b1)三官能以上的(甲基)丙烯酸酯和(b2)除(b1)以外的烯键式不饱和化合物,和(C)辐射敏感性聚合引发剂。 用于形成用于LCD面板的间隔物的方法包括以下过程:(a)在基底上形成上述辐射敏感性树脂组合物的膜,(b)暴露至少一部分膜,(c) 曝光后的胶片,(d)显影后加热胶片。