公开(公告)号：AU6892298A

公开(公告)日：1998-10-30

申请号：AU6892298

申请日：1998-04-07

Applicant: KLA TENCOR CORP

Inventor： NORTON ADAM E ,  JOHNSON KENNETH C ,  CARTER JOSEPH R

IPC: G01J4/04 ,  G01N21/21 ,  G01N21/27 ,  G02B27/58 ,  G03F7/20 ,  H01J3/14

Abstract: Because of diffraction effects caused by slits or apertures in optical measurement systems, the radiation energy which is directed towards a particular region on a sample will be spread over a larger area than desirable. By employing an apodizing filter in the radiation path in such system, diffraction tails of the system will be reduced. The apodizing filter preferably has a pattern of alternating high transmittance areas and substantially opaque areas where the locally averaged transmittance function is an apodizing function. In the preferred embodiment, the locally averaged transmittance function varies smoothly and monotonically from the periphery to the center of the filter.