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1.发明专利
公开(公告)号：AU3205999A
公开(公告)日：1999-10-25
申请号：AU3205999
申请日：1999-03-25
Applicant: KLA TENCOR CORP
Inventor： NORTON ADAM E
Abstract: Achromatic optics may be employed in spectroscopic measurement systems. The achromatic optics comprises a spherical mirror receiving a beam of radiation in a direction away from its axis and a pair of lenses: a positive lens and a negative meniscus lens. The negative meniscus lens corrects for the spherical aberration caused by off-axis reflection from the spherical mirror. The positive lens compensates for the achromatic aberration introduced by the negative lens so that the optics, as a whole, is achromatic over visible and ultraviolet wavelengths. Preferably, the two lenses combined have zero power or close to zero power. By employing a spherical mirror, it is unnecessary to employ ellipsoidal or paraboloidal mirrors with artifacts of diamond turning which limit the size of the spot of the sample that can be measured in ellipsometry, reflectometry or scatterometry.
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公开(公告)号：AU6892298A
公开(公告)日：1998-10-30
申请号：AU6892298
申请日：1998-04-07
Applicant: KLA TENCOR CORP
Inventor： NORTON ADAM E , JOHNSON KENNETH C , CARTER JOSEPH R
Abstract: Because of diffraction effects caused by slits or apertures in optical measurement systems, the radiation energy which is directed towards a particular region on a sample will be spread over a larger area than desirable. By employing an apodizing filter in the radiation path in such system, diffraction tails of the system will be reduced. The apodizing filter preferably has a pattern of alternating high transmittance areas and substantially opaque areas where the locally averaged transmittance function is an apodizing function. In the preferred embodiment, the locally averaged transmittance function varies smoothly and monotonically from the periphery to the center of the filter.
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