公开(公告)号：WO0120304A3

公开(公告)日：2001-10-04

申请号：PCT/US0024888

申请日：2000-09-11

Applicant: KLA TENCOR CORP

Inventor： NIKOONAHAD MEHRDAD ,  LEE SHING ,  KELE KALMAN ,  ZHAO GUOHENG ,  LEHMAN KURT R

IPC: B24B37/005 ,  B24B49/12 ,  B24D7/12 ,  G01B11/00 ,  G01B11/06 ,  G01N1/32 ,  G01N1/34 ,  G01N21/00 ,  G01N21/15 ,  G01N21/21 ,  G01N21/45 ,  G01N21/47 ,  H01L21/304 ,  B24B37/04

CPC classification number: G01N21/15 ,  B24B37/005 ,  B24B49/12 ,  B24D7/12 ,  G01B11/00 ,  G01B11/0683

Abstract: Disclosed is a self-clearing objective (100) for directing a beam towards a sample and clearing away debris from an optical viewing path adjacent to the sample. The self-clearing objective includes an optical element (106, 210, 310, 408, 510) and a substantially transparent fluid (104, 213, 326, 512) flowing between the optical element and the sample such that at least a portion adjacent to the sample is substantially cleared of debris. The optical element and the fluid cooperatively direct the beam towards the sample. This self-clearing objective may be coupled with various measurement devices to measure various characteristics of samples having debris that prevents clear optical measurements. Additionally, the measurement device may be integrated with or coupled to various sample processing systems so that the relevant process may be clearly monitored.

Abstract translation: 公开了一种用于将光束引向样品并从邻近样品的光学观察路径清除碎屑的自清除目标（100）。 自清理物镜包括在光学元件和样品之间流动的光学元件（106,210,310,408,510）和基本上透明的流体（104,213,326,512），使得至少一部分邻近 样品基本上清除了碎片。 光学元件和流体协调地将光束引向样品。 这种自清除物镜可以与各种测量装置耦合，以测量具有防止清晰光学测量的碎片的样品的各种特性。 此外，测量装置可以与各种样品处理系统集成或耦合到可以清楚地监测相关过程。