公开(公告)号：DE112014000948T5

公开(公告)日：2015-11-05

申请号：DE112014000948

申请日：2014-02-21

Applicant: KLA TENCOR CORP

Inventor： SALNIK ALEX ,  BEZEL ILYA V ,  SHCHEMELININ ANATOLY ,  CHIMMALGI ANANT

IPC: H01J11/18

Abstract: Ein lasergestütztes Plasma-Beleuchtungssystem beinhaltet mindestens eine Laserlichtquelle, um Licht bereitzustellen. Mindestens ein Reflektor fokussiert das Licht von der Laserlichtquelle in einem Brennpunkt des Reflektors. Ein im Wesentlichen mit einem Gas gefülltes Behältnis ist an oder nahe dem Brennpunkt des Reflektors positioniert. Das Licht von der Laserlichtquelle erhält ein in dem Behältnis eingeschlossenes Plasma zumindest teilweise aufrecht. Das Behältnis hat zumindest eine Wandung mit einer Dicke, welche ungleichmäßig ist, um optische Aberrationen in dem System zu kompensieren.

公开(公告)号：WO2012138460A2

公开(公告)日：2012-10-11

申请号：PCT/US2012028910

申请日：2012-03-13

Applicant: KLA TENCOR CORP ,  ZHAO GUOHENG ,  LEVY ADY ,  SALNIK ALEX ,  VAEZ-IRAVANI MEHDI ,  NICOLAIDES LENA ,  NGAI SAMUEL S H

Inventor： ZHAO GUOHENG ,  LEVY ADY ,  SALNIK ALEX ,  VAEZ-IRAVANI MEHDI ,  NICOLAIDES LENA ,  NGAI SAMUEL S H

IPC: G01N21/01 ,  F21S2/00 ,  F21V8/00 ,  G01R31/26

CPC classification number: H05B33/0803

Abstract: An apparatus for illuminating a target surface, the apparatus having a plurality of LED arrays, where each of the arrays has a plurality of individually addressable LEDs, and where at least one of the arrays is disposed at an angle of between about forty-five degrees and about ninety degrees relative to the target surface, where all of the arrays supply light into a light pipe, the light pipe having interior walls made of a reflective material, where light exiting the light pipe illuminates the target surface, and a controller for adjusting an intensity of the individually addressable light sources.

Abstract translation: 一种用于照射目标表面的装置，该装置具有多个LED阵列，其中每个阵列具有多个独立可寻址的LED，并且其中至少一个阵列以大约四十五度之间的角度设置 并且相对于目标表面大约九十度，其中所有阵列将光提供到光管中，光管具有由反射材料制成的内壁，其中离开光管的光照射目标表面，以及用于调节的控制器 独立寻址光源的强度。

公开(公告)号：EP3100032A4

公开(公告)日：2017-08-30

申请号：EP15749379

申请日：2015-02-11

Applicant: KLA-TENCOR CORP

Inventor： NICOLAIDES LENA ,  MAHADEVAN MOHAN ,  SALNIK ALEX ,  YOUNG SCOTT A

IPC: G01N21/95 ,  G01N21/17 ,  G01N21/39 ,  G01N21/88 ,  H01L21/66

CPC classification number: G01N21/9505 ,  G01N21/1717 ,  G01N21/9501 ,  G01N2021/8825 ,  G01N2201/06113

Abstract: Disclosed are methods and apparatus for detecting defects or reviewing defects in a semiconductor sample. The system has a brightfield (BF) module for directing a BF illumination beam onto a sample and detecting an output beam reflected from the sample in response to the BF illumination beam. The system has a modulated optical reflectance (MOR) module for directing a pump and probe beam to the sample and detecting a MOR output beam from the probe spot in response to the pump beam and the probe beam. The system includes a processor for analyzing the BF output beam from a plurality of BF spots to detect defects on a surface or near the surface of the sample and analyzing the MOR output beam from a plurality of probe spots to detect defects that are below the surface of the sample.

Abstract translation: 公开了用于检测缺陷或检查半导体样品中的缺陷的方法和设备。 该系统具有明场（BF）模块，用于将BF照明光束引导到样本上，并响应于BF照明光束检测从样本反射的输出光束。 该系统具有调制的光学反射（MOR）模块，用于将泵浦和探测光束引导至样品，并响应于泵浦光束和探测光束从探测点探测MOR输出光束。 该系统包括处理器，用于分析来自多个BF点的BF输出束以检测样品的表面上或附近的缺陷并分析来自多个探针点的MOR输出束以检测低于表面的缺陷 的样本。