公开(公告)号：AU3965402A

公开(公告)日：2002-07-01

申请号：AU3965402

申请日：2001-12-18

Applicant: KLA TENCOR CORP

Inventor： ZHAO GUOHENG ,  GROSS KENNETH P ,  SMEDT RODNEY ,  NIKOONAHAD MEHRDAD

IPC: G01B11/00

Abstract: A periodic structure is illuminated by polychromatic electromagnetic radiation. Radiation from the structure is collected and divided into two rays having different polarization states. The two rays are detected from which one or more parameters of the periodic structure may be derived. In another embodiment, when the periodic structure is illuminated by a polychromatic electromagnetic radiation, the collected radiation from the structure is passed through a polarization element having a polarization plane. The element and the polychromatic beam are controlled so that the polarization plane of the element are at two or more different orientations with respect to the plane of incidence of the polychromatic beam. Radiation that has passed through the element is detected when the plane of polarization is at the two or more positions so that one or more parameters of the periodic structure may be derived from the detected signals. At least one of the orientations of the plane of polarization is substantially stationary when the detection takes place. To have as small a footprint as possible, one employs an optical device that includes a first element directing a polychromatic beam of electromagnetic radiation to the structure and a second optical element collecting radiation from the structure where the two elements form an integral unit or are attached together to form an integrated unit. To reduce the footprint, the measurement instrument and the wafer are both moved. In one embodiment, both the apparatus and the wafer undergo translational motion transverse to each other. In a different arrangement, one of the two motions is translational and the other is rotational. Any one of the above-described embodiments may be included in an integrated processing and detection apparatus which also includes a processing system processing the sample, where the processing system is responsive to the output of any one of the above embodiments for adjusting a processing parameter.

公开(公告)号：WO0250509A3

公开(公告)日：2002-12-12

申请号：PCT/US0149259

申请日：2001-12-18

Applicant: KLA TENCOR CORP

Inventor： ZHAO GUOHENG ,  GROSS KENNETH P ,  SMEDT RODNEY ,  NIKOONAHAD MEHRDAD

IPC: G01B11/00 ,  G01J4/00

CPC classification number: G01N21/21 ,  G01B11/00 ,  G01N21/4788 ,  G01N21/956

Abstract: A periodic structure (32) is illuminated by polychromatic electromagnetic radiation (20). Radiation from the structure is collected and divided into two rays having different polarization states. The two rays (46, 48) are detected from which one or more parameters of the periodic structure may be derived. In another embodiment, when the periodic structure is illuminated by a polychromatic electromagnetic radiation, the collected radiation from the structure is passed through a polarization element having a polarization plane. The element and the polychromatic beam are controlled so that the polarization plane of the element are at two or more different orientations with respect to the plane of incidence of the polychromatic beam.

Abstract translation: 周期性结构（32）被多色电磁辐射（20）照射。 收集来自结构的辐射并将其分成具有不同偏振状态的两条光线。 检测两条射线（46,48），从中可以导出周期性结构的一个或多个参数。 在另一个实施例中，当周期性结构被多色电磁辐射照射时，来自该结构的收集的辐射穿过具有偏振面的偏振元件。 元件和多色光束受到控制，使得元件的偏振面相对于多色光束的入射面处于两个或更多个不同的取向。