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    APPARATUS AND METHOD FOR MEASURING POSITION AND/OR MOTION USING SURFACE MICRO-STRUCTURE
    1.
    发明申请
    APPARATUS AND METHOD FOR MEASURING POSITION AND/OR MOTION USING SURFACE MICRO-STRUCTURE 审中-公开
    使用表面微结构测量位置和/或运动的装置和方法

    公开(公告)号：WO2011056318A3

    公开(公告)日：2011-07-14

    申请号：PCT/US2010050045

    申请日：2010-09-23

    Applicant: KLA TENCOR CORP ,  UMMETHALA UPENDRA ,  BAREKET NOAH ,  BEVIS CHRISTOPHER

    Inventor： UMMETHALA UPENDRA ,  BAREKET NOAH ,  BEVIS CHRISTOPHER

    IPC: G01B11/00 ,  H01L21/66

    CPC classification number: G01B11/0691 ,  B82Y10/00 ,  B82Y40/00 ,  G01P3/806 ,  H01J37/3174

    Abstract: One embodiment relates to a method in which a measuring apparatus is used to collect a first set of wave form data which depends on micro-structure of a moving surface. A correspondence is identified between the first set of wave form data and actual position data. Calibrated wave form data is stored which indicates said correspondence between the first set of wave form data and actual position data. In addition, the measuring apparatus may be used to collect a second set of wave form data which depends on micro-structure of the moving surface, a cross-correlation may be computed between the second set of wave form data and the calibrated wave form data. Another embodiment relates to an apparatus for measuring position and/or motion using surface micro-structure of a moving surface. Another embodiment relates to method for measuring motion using surface micro-structure. Other embodiments and features are also disclosed.

    Abstract translation: 一个实施例涉及一种方法，其中使用测量装置来收集取决于移动表面的微观结构的第一组波形数据。 在第一组波形数据和实际位置数据之间识别对应关系。 存储表示第一组波形数据与实际位置数据之间的对应关系的校准波形数据。 此外，测量装置可以用于收集取决于运动表面的微观结构的第二组波形数据，可以在第二组波形数据和校准波形数据之间计算互相关 。 另一个实施例涉及使用移动表面的表面微结构测量位置和/或运动的装置。 另一实施例涉及使用表面微结构测量运动的方法。 还公开了其它实施例和特征。

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