Patent search ap:("KLA TENCOR CORP") AND inv:"NAYFEH SAMIR" Page 1

1.

发明公开
LINEAR STAGE AND METROLOGY ARCHITECTURE FOR REFLECTIVE ELECTRON BEAM LITHOGRAPHY 审中-公开
Title translation: 线性步长和测量基础结构反映电子光刻

公开(公告)号：EP2859577A4

公开(公告)日：2016-05-25

申请号：EP13804795

申请日：2013-06-12

Applicant: KLA TENCOR CORP

Inventor： UMMETHALA UPENDRA , HALE LAYTON , CLYNE JOSH , NAYFEH SAMIR , WILLIAMS MARK , DIREGOLO JOSEPH , WILSON ANDREW

IPC: H01L21/027 , G03F7/20

CPC classification number: G01B11/02 , B82Y10/00 , B82Y40/00 , G01B11/14 , G01B21/16 , G03F7/70716 , G03F7/70775 , G03F7/70816 , H01J37/20 , H01J37/244 , H01J37/3174 , H01J2237/2445 , H01J2237/24578 , H01J2237/30433 , H01J2237/30438

2.

发明公开
LINEAR STAGE FOR REFLECTIVE ELECTRON BEAM LITHOGRAPHY 审中-公开
Title translation: 电子科技大学学报（社会科学版）ELEKTRONENSTRAHL-LITHOGRAPHIE

公开(公告)号：EP2754173A4

公开(公告)日：2015-01-28

申请号：EP12829998

申请日：2012-09-06

Applicant: KLA TENCOR CORP

Inventor： UMMETHALA UPENDRA , HALE LAYTON , CLYNE JOSHUA , NAYFEH SAMIR , WILLIAMS MARK , DIREGOLO JOSEPH , WILSON ANDREW

IPC: H01L21/673

CPC classification number: G03F7/70716 , B82Y10/00 , B82Y40/00 , G03F7/70758 , G03F7/70766 , H01J37/20 , H01J37/3174 , H01J2237/20221 , H01J2237/31774 , H01J2237/31789

3.

发明公开
ARRANGEMENT OF RETICLE POSITIONING DEVICE FOR ACTINIC INSPECTION OF EUV RETICLES 审中-公开
Title translation: 安排RETIKELPOSITIONIERUNGSVORRICHTUNG辐射调查EUV光罩作者：

公开(公告)号：EP2836874A4

公开(公告)日：2016-04-27

申请号：EP13775812

申请日：2013-04-10

Applicant: KLA TENCOR CORP

Inventor： SUBRAHMANYAN PRADEEP , WILLIAMS MARK , NAYFEH SAMIR

IPC: G03F1/84 , G03B27/62 , G03F7/20

CPC classification number: G01N21/01 , G03F1/84

Abstract: A reticle positioning apparatus for actinic EUV reticle inspection including a sealed inspection chamber containing a reticle stage for holding a reticle. The reticle stage has a magnetically suspended upper stage with a long travel in a “y” direction and a magnetically suspended lower stage with a long travel in an “x” direction; and a cable stage chamber isolated from the inspection chamber by a cable chamber wall. The cable stage chamber has a cable stage movable in the “y” direction; and a tube connected at one end to the reticle stage and to the cable stage at the other end. The tube passes from the cable stage through the inspection chamber through a seal in the chamber wall and opening into the cable entry chamber for entry of cables and hoses within the cable stage chamber, which cables and hoses pass through the tube to the reticle stage.

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