公开(公告)号：SG11202010081VA

公开(公告)日：2020-11-27

申请号：SG11202010081V

申请日：2019-04-12

Applicant: KLA TENCOR CORP

Inventor： DIGHE PRASANNA ,  MUELLER DIETER ,  CHEN DONG ,  CHEN DENGPENG ,  ZAMEK STEVE ,  KAVALDJIEV DANIEL ,  BUETTNER ALEXANDER

IPC: G01N21/47 ,  G01N21/41

Abstract: A system for analyzing a sample includes an illumination source with a plurality of transmitting optical fibers optically coupled to the illumination source and a detector with a plurality of receiving optical fibers optically coupled to the detector. The system further includes a plurality of probes coupled to respective ones of the plurality of transmitting optical fibers and respective ones of the plurality of receiving optical fibers. The plurality of probes are configured to illuminate respective portions of a surface of the sample and configured to receive illumination reflected, refracted, or radiated from the respective portions of the surface of the sample. The system may further include one or more switches and/or splitters configured to optically couple respective ones of the plurality of transmitting optical fibers to the illumination source and/or configured to optically couple respective ones of the plurality of receiving optical fibers to the detector.