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公开(公告)号：EP3117453A4
公开(公告)日：2017-11-01
申请号：EP15809587
申请日：2015-06-19
Applicant: KLA-TENCOR CORP
Inventor： NICOLAIDES LENA , TSAI BEN-MING BENJAMIN , AJI PRASHANT A , GASVODA MICHAEL , STOKOWSKI STANLEY E , ZHAO GUOHENG , WEN YOUXIAN , MAHADEVAN MOHAN , HORN PAUL D , VOLLRATH WOLFGANG
IPC: H01L21/66 , G01N21/95 , G03F7/20 , H01L21/027
CPC classification number: G01N21/9503 , G01N2201/06113 , G03F7/7085 , H01L22/12
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