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1.发明公开METHODS AND SYSTEMS FOR GENERATING INFORMATION TO BE USED FOR SELECTING VALUES FOR ONE OR MORE PARAMETERS OF A DETECTION ALGORITHM 审中-公开VERFAHREN UND SYSTEME ZUR ERZEUGUNG VON INFORMATIONENFÜRDIE AUSWAHL VON WERTENFÜREINEN ODER MEHRERE PARAMETER EINES DETEKTIONSALGORITHMUS
公开(公告)号：EP2289096A4
公开(公告)日：2017-08-02
申请号：EP09759037
申请日：2009-05-26
Applicant: KLA-TENCOR CORP
Inventor： CHEN HONG , VAN RIET MICHAEL J , CHEN CHIEN - HUEI (ADAM) , LIN JASON Z , MAHER CHRIS , KOWALSKI MICHAEL , BECKER BARRY , CHEN STEPHANIE , BALAKRISHNAN SUBRAMANIAN , TUMMALA SURYANARAYANA
IPC: H01L21/66
CPC classification number: G01N21/9501 , G01N21/956 , G01N2021/8822 , G01N2021/8854
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