公开(公告)号：JP2014195090A

公开(公告)日：2014-10-09

申请号：JP2014094395

申请日：2014-05-01

Applicant: Kla-Tencor Corp ,  ケーエルエー−テンカー・コーポレーションKla−Tencor Corporation

Inventor： BHASKAR KRIS ,  CHETANA BHASKAR ,  ASHOK KULKARNI ,  ROSENGAUS ELIEZER ,  CECILIA CAMPOCHIARO ,  MAHER CHRIS ,  BRIAN DUFFY ,  ANEESH KHULLAR ,  ALPA KOHLI ,  LALITA BALASUBRAMANIAN ,  SANTOSH BHATTACHARYYA ,  MAHADEVAN MOHAN

IPC: H01L21/66 ,  H01L21/02

CPC classification number: G06T7/001 ,  G06T1/20 ,  G06T2207/30148

Abstract: PROBLEM TO BE SOLVED: To provide various systems and methods for creating persistent data for a wafer and using persistent data for inspection-related functions.SOLUTION: One system includes a set of processor nodes 20 coupled to a detector 10 of an inspection system. Each of the processor nodes 20 is configured to receive a portion of image data generated by the detector 10 during scanning of a wafer 12. The system also includes an array 22 of storage media separately coupled to each of the processor nodes 20. The processor nodes 20 are configured to send all of the image data or a selected portion of the image data received by the processor nodes 20 to the arrays 22 of storage media such that all of the image data or the selected portion of the image data generated by the detector 10 during the scanning of the wafer 12 is stored in the arrays 22 of the storage media.

Abstract translation: 要解决的问题：提供用于为晶片创建持久数据并使用持久数据进行检查相关功能的各种系统和方法。解决方案：一个系统包括耦合到检查系统的检测器10的一组处理器节点20。 每个处理器节点20被配置为在晶片12的扫描期间接收由检测器10生成的图像数据的一部分。该系统还包括分别耦合到每个处理器节点20的存储介质的阵列22.处理器节点 20被配置为将由处理器节点20接收的图像数据的所有图像数据或所选部分发送到存储介质的阵列22，使得由检测器生成的图像数据或图像数据的所选部分 在晶片12的扫描期间，10被存储在存储介质的阵列22中。

公开(公告)号：WO2009039486A3

公开(公告)日：2009-06-11

申请号：PCT/US2008077203

申请日：2008-09-22

Applicant: KLA TENCOR CORP ,  BHASKAR KRIS ,  BHASKAR CHETANA ,  KULKARNI ASHOK ,  ROSENGAUS ELIEZER ,  CAMPOCHIARO CECELIA ,  MAHER CHRIS ,  DUFFY BRIAN ,  KHULLAR ANEESH ,  KOHLI ALPA ,  BALASUBRAMANIAN LALITA ,  BHATTACHARYYA SANTOSH ,  MAHADEVAN MOHAN

Inventor： BHASKAR KRIS ,  BHASKAR CHETANA ,  KULKARNI ASHOK ,  ROSENGAUS ELIEZER ,  CAMPOCHIARO CECELIA ,  MAHER CHRIS ,  DUFFY BRIAN ,  KHULLAR ANEESH ,  KOHLI ALPA ,  BALASUBRAMANIAN LALITA ,  BHATTACHARYYA SANTOSH ,  MAHADEVAN MOHAN

IPC: H01L21/66

CPC classification number: G06T7/001 ,  G06T1/20 ,  G06T2207/30148

Abstract: Various systems and methods for creating persistent data for a wafer and using persistent data for inspection-related functions are provided. One system includes a set of processor nodes coupled to a detector of an inspection system. Each of the processor nodes is configured to receive a portion of image data generated by the detector during scanning of a wafer. The system also includes an array of storage media separately coupled to each of the processor nodes. The processor nodes are configured to send all of the image data or a selected portion of the image data received by the processor nodes to the arrays of storage media such that all of the image data or the selected portion of the image data generated by the detector during the scanning of the wafer is stored in the arrays of the storage media.

Abstract translation: 提供了用于为晶片创建持久数据并将持久数据用于检查相关功能的各种系统和方法。 一个系统包括耦合到检查系统的检测器的一组处理器节点。 每个处理器节点被配置为在扫描晶片期间接收由检测器产生的图像数据的一部分。 该系统还包括分别耦合到每个处理器节点的存储介质阵列。 处理器节点被配置为将由处理器节点接收的所有图像数据或图像数据的选定部分发送到存储介质阵列，使得由检测器生成的所有图像数据或图像数据的所选部分 在扫描晶片期间存储在存储介质的阵列中。

公开(公告)号：EP2195834A4

公开(公告)日：2017-12-27

申请号：EP08831947

申请日：2008-09-22

Applicant: KLA-TENCOR CORP

Inventor： BHASKAR KRIS ,  BHASKAR CHETANA ,  KULKARNI ASHOK ,  ROSENGAUS ELIEZER ,  CAMPOCHIARO CECELIA ,  MAHER CHRIS ,  DUFFY BRIAN ,  KHULLAR ANEESH ,  KOHLI ALPA ,  BALASUBRAMANIAN LALITA ,  BHATTACHARYYA SANTOSH ,  MAHADEVAN MOHAN

IPC: H01L21/66 ,  G06T1/20 ,  G06T7/00

CPC classification number: G06T7/001 ,  G06T1/20 ,  G06T2207/30148

Abstract: Various systems and methods for creating persistent data for a wafer and using persistent data for inspection-related functions are provided. One system includes a set of processor nodes coupled to a detector of an inspection system. Each of the processor nodes is configured to receive a portion of image data generated by the detector during scanning of a wafer. The system also includes an array of storage media separately coupled to each of the processor nodes. The processor nodes are configured to send all of the image data or a selected portion of the image data received by the processor nodes to the arrays of storage media such that all of the image data or the selected portion of the image data generated by the detector during the scanning of the wafer is stored in the arrays of the storage media.

公开(公告)号：EP2289096A4

公开(公告)日：2017-08-02

申请号：EP09759037

申请日：2009-05-26

Applicant: KLA-TENCOR CORP

Inventor： CHEN HONG ,  VAN RIET MICHAEL J ,  CHEN CHIEN - HUEI (ADAM) ,  LIN JASON Z ,  MAHER CHRIS ,  KOWALSKI MICHAEL ,  BECKER BARRY ,  CHEN STEPHANIE ,  BALAKRISHNAN SUBRAMANIAN ,  TUMMALA SURYANARAYANA

IPC: H01L21/66

CPC classification number: G01N21/9501 ,  G01N21/956 ,  G01N2021/8822 ,  G01N2021/8854