公开(公告)号：WO2003083560A3

公开(公告)日：2003-10-09

申请号：PCT/US2003/009537

申请日：2003-03-28

Applicant: KLA-TENCOR TECHNOLOGIES CORPORATION

Inventor： WILK, Dieter, E. ,  TANG, Anlun ,  VELLA, Eric, N. ,  RUNYON, Rex ,  SULLIVAN, Jamie, M. ,  JOHNSON, Ralph, T.

IPC: G01N21/88

Abstract: Disclosed are mechanisms for selectively filtering spatial portions of light emanating from a sample under inspection within an optical system. In one embodiment, a programmable spatial filter (PSF) is constructed from materials that are compatible with light in a portion of the UV wavelength range. In a specific implementation, the PSF is constructed from a UV compatible material, such as a polymer stabilized liquid crystal material. In a further aspect, the PSF also includes a pair of plates that are formed from a UV grade glass. The PSF may also include a relatively thin first and second ITO layer that results in a sheet resistance between about 100 and about 300 W per square. In a specific embodiment, the PSF provides selective filtering in two directions. In other words, the PSF provides two dimensional filtering.

公开(公告)号：WO2003083560A2

公开(公告)日：2003-10-09

申请号：PCT/US2003/009537

申请日：2003-03-28

Applicant: KLA-TENCOR TECHNOLOGIES CORPORATION

Inventor： WILK, Dieter, E. ,  TANG, Anlun ,  VELLA, Eric, N. ,  RUNYON, Rex ,  SULLIVAN, Jamie, M. ,  JOHNSON, Ralph, T.

IPC: G02F

CPC classification number: G02B27/46 ,  G01N21/9501 ,  G01N21/95623 ,  G01N2021/8822 ,  G01N2021/95676

Abstract: Disclosed are mechanisms for selectively filtering spatial portions of light emanating from a sample under inspection within an optical system. In one embodiment, a programmable spatial filter (PSF) is constructed from materials that are compatible with light in a portion of the UV wavelength range. In a specific implementation, the PSF is constructed from a UV compatible material, such as a polymer stabilized liquid crystal material. In a further aspect, the PSF also includes a pair of plates that are formed from a UV grade glass. The PSF may also include a relatively thin first and second ITO layer that results in a sheet resistance between about 100 and about 300 W per square. In a specific embodiment, the PSF provides selective filtering in two directions. In other words, the PSF provides two dimensional filtering.

Abstract translation: 公开了用于在光学系统内选择性地过滤从被检样品发出的光的空间部分的机构。 在一个实施例中，可编程空间滤波器（PSF）由与UV波长范围的一部分中的光相容的材料构成。 在具体实施中，PSF由UV相容材料构成，例如聚合物稳定的液晶材料。 在另一方面，PSF还包括一对由UV级玻璃形成的板。 PSF还可以包括相对较薄的第一和第二ITO层，其导致约100至约300W每平方的薄层电阻。 在特定实施例中，PSF在两个方向上提供选择性滤波。 换句话说，PSF提供二维过滤。

公开(公告)号：EP1495357B1

公开(公告)日：2013-10-30

申请号：EP03745648.0

申请日：2003-03-28

Applicant: KLA-Tencor Technologies Corporation

Inventor： WILK, Dieter, E. ,  TANG, Anlun ,  VELLA, Eric, N. ,  RUNYON, Rex ,  SULLIVAN, Jamie, M. ,  JOHNSON, Ralph, T.

IPC: G01N21/956 ,  G02B27/46

CPC classification number: G02B27/46 ,  G01N21/9501 ,  G01N21/95623 ,  G01N2021/8822 ,  G01N2021/95676

公开(公告)号：EP1495357A2

公开(公告)日：2005-01-12

申请号：EP03745648.0

申请日：2003-03-28

Applicant: KLA-Tencor Technologies Corporation

Inventor： WILK, Dieter, E. ,  TANG, Anlun ,  VELLA, Eric, N. ,  RUNYON, Rex ,  SULLIVAN, Jamie, M. ,  JOHNSON, Ralph, T.

IPC: G02F1/00

CPC classification number: G02B27/46 ,  G01N21/9501 ,  G01N21/95623 ,  G01N2021/8822 ,  G01N2021/95676

Abstract: Disclosed are mechanisms for selectively filtering spatial portions of light emanating from a sample under inspection within an optical system. In one embodiment, a programmable spatial filter (PSF) is constructed from materials that are compatible with light in a portion of the UV wavelength range. In a specific implementation, the PSF is constructed from a UV compatible material, such as a polymer stabilized liquid crystal material. In a further aspect, the PSF also includes a pair of plates that are formed from a UV grade glass. The PSF may also include a relatively thin first and second ITO layer that results in a sheet resistance between about 100 and about 300 W per square. In a specific embodiment, the PSF provides selective filtering in two directions. In other words, the PSF provides two dimensional filtering.