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    UV COMPATIBLE PROGRAMMABLE SPATIAL FILTER
    1.
    发明申请
    UV COMPATIBLE PROGRAMMABLE SPATIAL FILTER 审中-公开

    公开(公告)号：WO2003083560A3

    公开(公告)日：2003-10-09

    申请号：PCT/US2003/009537

    申请日：2003-03-28

    Applicant: KLA-TENCOR TECHNOLOGIES CORPORATION

    Inventor： WILK, Dieter, E. ,  TANG, Anlun ,  VELLA, Eric, N. ,  RUNYON, Rex ,  SULLIVAN, Jamie, M. ,  JOHNSON, Ralph, T.

    IPC: G01N21/88

    Abstract: Disclosed are mechanisms for selectively filtering spatial portions of light emanating from a sample under inspection within an optical system. In one embodiment, a programmable spatial filter (PSF) is constructed from materials that are compatible with light in a portion of the UV wavelength range. In a specific implementation, the PSF is constructed from a UV compatible material, such as a polymer stabilized liquid crystal material. In a further aspect, the PSF also includes a pair of plates that are formed from a UV grade glass. The PSF may also include a relatively thin first and second ITO layer that results in a sheet resistance between about 100 and about 300 W per square. In a specific embodiment, the PSF provides selective filtering in two directions. In other words, the PSF provides two dimensional filtering.

    UV COMPATIBLE PROGRAMMABLE SPATIAL FILTER
    2.
    发明申请
    UV COMPATIBLE PROGRAMMABLE SPATIAL FILTER 审中-公开
    UV兼容可编程空间滤波器

    公开(公告)号：WO2003083560A2

    公开(公告)日：2003-10-09

    申请号：PCT/US2003/009537

    申请日：2003-03-28

    Applicant: KLA-TENCOR TECHNOLOGIES CORPORATION

    Inventor： WILK, Dieter, E. ,  TANG, Anlun ,  VELLA, Eric, N. ,  RUNYON, Rex ,  SULLIVAN, Jamie, M. ,  JOHNSON, Ralph, T.

    IPC: G02F

    CPC classification number: G02B27/46 ,  G01N21/9501 ,  G01N21/95623 ,  G01N2021/8822 ,  G01N2021/95676

    Abstract: Disclosed are mechanisms for selectively filtering spatial portions of light emanating from a sample under inspection within an optical system. In one embodiment, a programmable spatial filter (PSF) is constructed from materials that are compatible with light in a portion of the UV wavelength range. In a specific implementation, the PSF is constructed from a UV compatible material, such as a polymer stabilized liquid crystal material. In a further aspect, the PSF also includes a pair of plates that are formed from a UV grade glass. The PSF may also include a relatively thin first and second ITO layer that results in a sheet resistance between about 100 and about 300 W per square. In a specific embodiment, the PSF provides selective filtering in two directions. In other words, the PSF provides two dimensional filtering.

    Abstract translation: 公开了用于在光学系统内选择性地过滤从被检样品发出的光的空间部分的机构。 在一个实施例中，可编程空间滤波器（PSF）由与UV波长范围的一部分中的光相容的材料构成。 在具体实施中，PSF由UV相容材料构成，例如聚合物稳定的液晶材料。 在另一方面，PSF还包括一对由UV级玻璃形成的板。 PSF还可以包括相对较薄的第一和第二ITO层，其导致约100至约300W每平方的薄层电阻。 在特定实施例中，PSF在两个方向上提供选择性滤波。 换句话说，PSF提供二维过滤。

    APPARATUS AND METHODS FOR OPTICALLY INSPECTING A SAMPLE FOR ANOMALIES
    3.
    发明申请
    APPARATUS AND METHODS FOR OPTICALLY INSPECTING A SAMPLE FOR ANOMALIES 审中-公开

    公开(公告)号：WO2003073476A3

    公开(公告)日：2003-09-04

    申请号：PCT/US2003/006182

    申请日：2003-02-26

    Applicant: KLA-TENCOR TECHNOLOGIES CORPORATION

    Inventor： WOLF, Ralph, C. ,  BENITEZ, Eva, L. ,  CHEN, Dongsheng (Don) ,  GREENE, John, D. ,  SULLIVAN, Jamie, M. ,  VELLA, Eric, N. ,  VO, Khiem, D.

    IPC: G01N21/88

    Abstract: Disclosed are methods and apparatus for detecting a wide dynamic range of intensity values from a beam from a sample, which is analyzed to determine the presence of defects on the sample. In one embodiment, the system directs an incident beam towards a sample and a detector positioned to detect a beam from the sample. The detector has a sensor (10) for detecting the incident beam and generating a signal and a non-linear component (182) coupled to the sensor arranged to generate a non-linear detected signal. An alternative embodiment provides a high-gain sensor (1502a) to detect the beam from the sample and a low-gain sensor (1502b) which also detects the beam and is used to sense the sample when the beam is originating in a bright region and protect the high-gain sensor by switching it off when the beam is too bright.

    APPARATUS AND METHODS FOR OPTICALLY INSPECTING A SAMPLE FOR ANOMOLIES
    4.
    发明申请
    APPARATUS AND METHODS FOR OPTICALLY INSPECTING A SAMPLE FOR ANOMOLIES 审中-公开
    用于光学检测样品的装置和方法

    公开(公告)号：WO2003073476A2

    公开(公告)日：2003-09-04

    申请号：PCT/US2003/006182

    申请日：2003-02-26

    Applicant: KLA-TENCOR TECHNOLOGIES CORPORATION

    Inventor： WOLF, Ralph, C. ,  BENITEZ, Eva, L. ,  CHEN, Dongsheng (Don) ,  GREENE, John, D. ,  SULLIVAN, Jamie, M. ,  VELLA, Eric, N. ,  VO, Khiem, D.

    IPC: H01L

    CPC classification number: G01N21/956 ,  G01N21/47 ,  G01N21/9501

    Abstract: Disclosed are methods and apparatus for detecting a relatively wide dynamic range of intensity values from a beam (e.g., scattered light, reflected light, or secondary electrons) originating from a sample, such as a semiconductor wafer. In other words, the inspection system provides detected output signals having wide dynamic ranges. The detected output signals may then be analyzed to determine whether defects are present on the sample. For example, the intensity values from a target die are compared to the intensity values from a corresponding portion of a reference die, where a significant intensity difference may be defined as a defect. In a specific embodiment, an inspection system for detecting defects on a sample is disclosed. The system includes a beam generator for directing an incident beam towards a sample surface and a detector positioned to detect a detected beam originating from the sample surface in response to the incident beam. The detector has a sensor for detecting the detected beam and generating a detected signal based on the detected beam and a non-linear component coupled to the sensor. The non-linear component is arranged to generate a non-linear detected signal based on the detected signal. The detector further includes a first analog-to-digital converter (ADC) coupled to the non-linear component. The first ADC is arranged to digitize the non-linear detected signal into a digitized detected signal.

    Abstract translation: 公开了用于检测来自诸如半导体晶片的样品的光束（例如，散射光，反射光或二次电子）的相对宽的动态范围的方法和装置。 换句话说，检查系统提供检测到的具有宽动态范围的输出信号。 然后可以分析检测到的输出信号，以确定样品中是否存在缺陷。 例如，将来自目标管芯的强度值与来自参考管芯的相应部分的强度值进行比较，其中将显着的强度差定义为缺陷。 在具体实施例中，公开了一种用于检测样品上的缺陷的检查系统。 该系统包括用于将入射光束引向样品表面的光束发生器，以及响应入射光束检测来自样品表面的检测光束的检测器。 检测器具有用于检测检测到的光束并基于检测到的光束产生检测信号的传感器和耦合到传感器的非线性分量。 非线性分量被布置成基于检测到的信号产生非线性检测信号。 检测器还包括耦合到非线性分量的第一模数转换器（ADC）。 第一ADC被布置成将非线性检测信号数字化为数字化的检测信号。

    UV COMPATIBLE PROGRAMMABLE SPATIAL FILTER
    6.
    发明公开
    UV COMPATIBLE PROGRAMMABLE SPATIAL FILTER 有权
    UV-兼容可编程空间滤波器

    公开(公告)号：EP1495357A2

    公开(公告)日：2005-01-12

    申请号：EP03745648.0

    申请日：2003-03-28

    Applicant: KLA-Tencor Technologies Corporation

    Inventor： WILK, Dieter, E. ,  TANG, Anlun ,  VELLA, Eric, N. ,  RUNYON, Rex ,  SULLIVAN, Jamie, M. ,  JOHNSON, Ralph, T.

    IPC: G02F1/00

    CPC classification number: G02B27/46 ,  G01N21/9501 ,  G01N21/95623 ,  G01N2021/8822 ,  G01N2021/95676

    Abstract: Disclosed are mechanisms for selectively filtering spatial portions of light emanating from a sample under inspection within an optical system. In one embodiment, a programmable spatial filter (PSF) is constructed from materials that are compatible with light in a portion of the UV wavelength range. In a specific implementation, the PSF is constructed from a UV compatible material, such as a polymer stabilized liquid crystal material. In a further aspect, the PSF also includes a pair of plates that are formed from a UV grade glass. The PSF may also include a relatively thin first and second ITO layer that results in a sheet resistance between about 100 and about 300 W per square. In a specific embodiment, the PSF provides selective filtering in two directions. In other words, the PSF provides two dimensional filtering.

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