公开(公告)号：WO2014172476A1

公开(公告)日：2014-10-23

申请号：PCT/US2014/034395

申请日：2014-04-16

Applicant: KLA-TENCOR CORPORATION

Inventor： STANKE, Fred ,  TOYTMAN, Ilya ,  ALLES, David ,  INDERHEES, Gregg ,  STOKOWSKI, Stanley ,  VAEZ-IRAVANI, Mehdi

IPC: H01L21/66 ,  H01L21/027

CPC classification number: G06T7/001 ,  G01N21/956 ,  G01N2021/95676 ,  G06K9/00 ,  G06T2207/10056 ,  G06T2207/30148

Abstract: Optical inspection methods and apparatus for high-resolution photomasks using only a test image. A filter is applied to an image signal received from radiation that is transmitted by or reflected from a photomask having a test image. The filter may be implemented using programmed control to adjust and control filter conditions, illumination conditions, and magnification conditions.

Abstract translation: 仅使用测试图像的高分辨率光掩模的光学检测方法和设备。 将滤波器应用于从具有测试图像的光掩模透射或反射的辐射接收的图像信号。 滤波器可以使用编程控制来实现，以调节和控制滤波器条件，照明条件和放大条件。

公开(公告)号：EP1000346B1

公开(公告)日：2003-10-22

申请号：EP98939174.3

申请日：1998-07-28

Applicant: KLA-Tencor Corporation

Inventor： ZHAO, Guoheng ,  STOKOWSKI, Stanley ,  VAEZ-IRAVANI, Mehdi

IPC: G01N21/88

CPC classification number: G01N21/9501

Abstract: A cylindrical mirror or lens is used to focus an input collimated beam of light onto a line on the surface to be inspected, where the line is substantially in the plane of incidence of the focused beam. An image of the beam is projected onto an array of charge-coupled devices parallel to the line for detecting anomalies and/or features of the surface, where the array is outside the plane of incidence of the focused beam.

公开(公告)号：EP1023582B1

公开(公告)日：2003-11-19

申请号：EP98947155.2

申请日：1998-09-18

Applicant: KLA-Tencor Corporation

Inventor： VAEZ-IRAVANI, Mehdi ,  STOKOWSKI, Stanley ,  ZHAO, Guoheng

IPC: G01N21/00 ,  G01N21/86 ,  G01B11/24 ,  G01N21/88 ,  G01N21/95 ,  G01B7/34

CPC classification number: G01J3/44 ,  G01J3/0216 ,  G01J3/0229 ,  G01N21/21 ,  G01N21/47 ,  G01N21/474 ,  G01N21/8806 ,  G01N21/94 ,  G01N21/9501 ,  G01N2021/8825 ,  G01N2021/8845 ,  G01N2021/8848 ,  G01N2201/065

Abstract: A curved mirrored surface (78) is used to collect radiation scattered by a sample surface (76a) and originating from a normal illumination beam (70) and an oblique illumination beam (90). The collected radiation is focused to a detector (80). Scattered radiation originating from the normal and oblique illumination beams may be distinguished by employing radiation at two different wavelengths, by intentionally introducing an offset between the spots illuminated by the two beams or by switching the normal and oblique illumination beams (70, 90) on and off alternately. Beam position error caused by change in sample height may be corrected by detecting specular reflection of an oblique illumination beam and changing the direction of illumination in response thereto. Butterfly-shaped spatial filters may be used in conjunction with curved mirror radiation collectors (78) to restrict detection to certain azimuthal angles.

公开(公告)号：EP1023582A1

公开(公告)日：2000-08-02

申请号：EP98947155.2

申请日：1998-09-18

Applicant: KLA-Tencor Corporation

Inventor： VAEZ-IRAVANI, Mehdi ,  STOKOWSKI, Stanley ,  ZHAO, Guoheng

IPC: G01N21/00 ,  G01N21/86 ,  G01B11/24

CPC classification number: G01J3/44 ,  G01J3/0216 ,  G01J3/0229 ,  G01N21/21 ,  G01N21/47 ,  G01N21/474 ,  G01N21/8806 ,  G01N21/94 ,  G01N21/9501 ,  G01N2021/8825 ,  G01N2021/8845 ,  G01N2021/8848 ,  G01N2201/065

Abstract: A curved mirrored surface (78) is used to collect radiation scattered by a sample surface (76a) and originating from a normal illumination beam (70) and an oblique illumination beam (90). The collected radiation is focused to a detector (80). Scattered radiation originating from the normal and oblique illumination beams may be distinguished by employing radiation at two different wavelengths, by intentionally introducing an offset between the spots illuminated by the two beams or by switching the normal and oblique illumination beams (70, 90) on and off alternately. Beam position error caused by change in sample height may be corrected by detecting specular reflection of an oblique illumination beam and changing the direction of illumination in response thereto. Butterfly-shaped spatial filters may be used in conjunction with curved mirror radiation collectors (78) to restrict detection to certain azimuthal angles.