ELECTRIC ELEMENT HAVING DUPLEX FIELD BOARD STRUCTURE

    公开(公告)号:JPH11261066A

    公开(公告)日:1999-09-24

    申请号:JP34059598

    申请日:1998-11-30

    Abstract: PROBLEM TO BE SOLVED: To drop yield voltage and ON-resistance, by extending a gate electrode in a lateral direction to a part of the upper side of a field insulating film from a gate area along the upper side of the center of a drift area, and extending a source electrode to a part of the field insulating film of the upper side of the drift area from a source area. SOLUTION: The gate electrode 7 of an electric element has a gate field board structure extended to a part of a field insulating film 3 through the center of the upper side of an n-type drift area 4 from a gate area in a lateral direction. A source electrode 11 has a field board structure extended to a part of the interlayer insulating film 10 of the upper side of the n-type drift area 4 from a source area. Thus, a depletion layer in the drift area 4 at the time of an operation changes by drain voltage and gate voltage. Yield voltage is boosted by RESURF(reduced surface field) effect in the drift area given by a source field board. Then, ON-resistance is reduced by the reduction of the depletion layer by the gate field board.

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