公开(公告)号：KR100778383B1

公开(公告)日：2007-11-22

申请号：KR20060054184

申请日：2006-06-16

Applicant: KOREA RES INST OF STANDARDS

Inventor： HONG SEUNG SOO ,  SIN YONG HYEON ,  LIM IN TAE

IPC: G01N27/00 ,  H01J29/94

Abstract: An apparatus and a method for measuring gas absorption characteristic of a cryogenic pump absorption panel are provided to improve an exhaust method of a cryogenic pump by estimating exhaust capability of the cryogenic pump. An apparatus for measuring gas absorption characteristic of a cryogenic pump absorption panel includes an electronic gun(210), a sensor(240), and a calculating unit. The electronic gun is installed in a chamber and inputs an electronic beam to the absorption panel. The sensor is installed in the chamber and detects an ion flying time and the amount of ion output from the surface of the absorption panel. The calculating unit determines a sort of gas, absorbed in the absorption panel, and calculates the amount of the gas from the ion flying time and the amount of ion.

Abstract translation: 提供了一种用于测量低温泵吸收板的气体吸收特性的装置和方法，以通过估算低温泵的排气能力来改善低温泵的排气方法。 一种用于测量低温泵吸收板的气体吸收特性的装置，包括电子枪（210），传感器（240）和计算单元。 电子枪安装在腔室中，并将电子束输入吸收面板。 传感器安装在室内，并检测离子飞行时间和从吸收板表面输出的离子量。 计算单元确定在吸收面板中吸收的一种气体，并根据离子飞行时间和离子量来计算气体量。