公开(公告)号：KR100778383B1

公开(公告)日：2007-11-22

申请号：KR20060054184

申请日：2006-06-16

Applicant: KOREA RES INST OF STANDARDS

Inventor： HONG SEUNG SOO ,  SIN YONG HYEON ,  LIM IN TAE

IPC: G01N27/00 ,  H01J29/94

Abstract: An apparatus and a method for measuring gas absorption characteristic of a cryogenic pump absorption panel are provided to improve an exhaust method of a cryogenic pump by estimating exhaust capability of the cryogenic pump. An apparatus for measuring gas absorption characteristic of a cryogenic pump absorption panel includes an electronic gun(210), a sensor(240), and a calculating unit. The electronic gun is installed in a chamber and inputs an electronic beam to the absorption panel. The sensor is installed in the chamber and detects an ion flying time and the amount of ion output from the surface of the absorption panel. The calculating unit determines a sort of gas, absorbed in the absorption panel, and calculates the amount of the gas from the ion flying time and the amount of ion.

Abstract translation: 提供了一种用于测量低温泵吸收板的气体吸收特性的装置和方法，以通过估算低温泵的排气能力来改善低温泵的排气方法。 一种用于测量低温泵吸收板的气体吸收特性的装置，包括电子枪（210），传感器（240）和计算单元。 电子枪安装在腔室中，并将电子束输入吸收面板。 传感器安装在室内，并检测离子飞行时间和从吸收板表面输出的离子量。 计算单元确定在吸收面板中吸收的一种气体，并根据离子飞行时间和离子量来计算气体量。

公开(公告)号：KR20090025828A

公开(公告)日：2009-03-11

申请号：KR20070090963

申请日：2007-09-07

Applicant: KOREA RES INST OF STANDARDS

Inventor： HONG SEUNG SOO ,  KIM JIN TAE ,  SHIN YONG HYEON

IPC: G01F25/00

CPC classification number: G01F25/0007 ,  G01F1/76 ,  G01F3/221

Abstract: A calibration/test device and method of a mass flowmeter equipped on a vacuum system are provided to improve efficiency of quality control by calibrating/testing the mass flowmeter with comparing it with a reference mass flowmeter attached to a mobile correction device. A calibration/test device of a mass flowmeter equipped on a vacuum system comprises a vacuum valve(14) and a mass flowmeter valve(16) to be corrected, which are serially installed in a pipeline, a connection port(18) connecting the vacuum valve and the mass flowmeter valve, and a mobile mass flowmeter correction device(100) connected to the connection port. The mobile mass flowmeter correction device includes a vacuum chamber(110) connected to the connection port, a chamber valve(114) connecting the vacuum chamber and the connection port, a reference mass flowmeter(116) connecting the chamber valve and the connection port, a reference mass flowmeter valve(118) regulating the gas flux, an air escape(120) exhausting the gas, a gate valve(122) connected between the vacuum chamber and the air escape, and a measuring unit measuring the physical properties of the gas flowing within the vacuum chamber.

Abstract translation: 提供了配备在真空系统上的质量流量计的校准/测试装置和方法，以通过与连接到移动校正装置的参考质量流量计进行比较来校准/测试质量流量计来提高质量控制的效率。 配备在真空系统上的质量流量计的校准/测试装置包括串联安装在管道中的真空阀（14）和待校正的质量流量计阀（16），连接真空的连接口（18） 阀和质量流量计阀，以及连接到连接端口的移动质量流量计校正装置（100）。 移动质量流量计校正装置包括连接到连接端口的真空室（110），连接真空室和连接口的室阀（114），连接室阀和连接口的参考质量流量计（116） 调节气体通量的参考质量流量计阀（118），排出气体的排气口（120），连接在真空室和排气口之间的闸阀（122）以及测量气体物理性质的测量单元 在真空室内流动。