公开(公告)号：US11867643B2

公开(公告)日：2024-01-09

申请号：US17050373

申请日：2019-04-15

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Hyo Chang Lee ,  Jung Hyung Kim ,  Dae Jin Seong ,  Hee Jung Yeom

IPC: G01N22/00 ,  H01J37/32 ,  H01L21/683 ,  H01Q1/24 ,  H01Q1/52 ,  H01Q9/02 ,  H01Q21/00 ,  H01Q21/06

CPC classification number: G01N22/00 ,  H01J37/3222 ,  H01J37/32715 ,  H01J37/32935 ,  H01L21/6833 ,  H01Q1/24 ,  H01Q1/523 ,  H01Q1/525 ,  H01Q9/02 ,  H01Q21/0031 ,  H01Q21/065 ,  H01J2237/2007

Abstract: The present invention relates to a planar-type plasma diagnosis apparatus comprising: a transmission antenna for applying a frequency-variable microwave to plasma; a reception antenna for receiving the microwave from the plasma; and a body part encompassing the transmission antenna and the reception antenna so that same are insulated from each other, wherein the upper surface of the transmission antenna for applying the microwave and the upper surface of the reception antenna for receiving the microwave are planar, and side surfaces of the upper surfaces of the transmission antenna and the reception antenna face each other.