公开(公告)号：US11735397B2

公开(公告)日：2023-08-22

申请号：US17222937

申请日：2021-04-05

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Hyo Chang Lee ,  Jung Hyung Kim ,  Hee Jung Yeom

IPC: H01J37/32

CPC classification number: H01J37/3222 ,  H01J37/32311 ,  H01J37/32935 ,  H01J2237/24585

Abstract: Disclosed herein is a device for measuring a plasma ion density, which includes a transceiver antenna configured to apply and receive a microwave, of which a frequency is varied, to and from plasma, and a frequency analyzer configured to analyze a frequency of the microwave received from the transceiver antenna and measure a cut-off frequency, wherein the frequency of the microwave applied to the plasma is varied in the range of 100 kHz to 500 MHz.

公开(公告)号：US11211231B2

公开(公告)日：2021-12-28

申请号：US16461687

申请日：2018-01-02

Applicant: Korea Research Institute of Standards and Science

Inventor： Hyo Chang Lee ,  Jung-Hyung Kim ,  Dae-Jin Seong

IPC: H01J37/32 ,  H05H1/24 ,  H05H1/46

Abstract: A plasma generation apparatus includes a plasma generation unit. The plasma generation unit has a spherical or elliptical cavity. The plasma generation unit receives radio-frequency (RF) power in such a manner that bounce resonance of electrons is performed to generate plasma in the cavity. The cavity has a plasma extraction hole to communicate with an external space.

公开(公告)号：US11867643B2

公开(公告)日：2024-01-09

申请号：US17050373

申请日：2019-04-15

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Hyo Chang Lee ,  Jung Hyung Kim ,  Dae Jin Seong ,  Hee Jung Yeom

IPC: G01N22/00 ,  H01J37/32 ,  H01L21/683 ,  H01Q1/24 ,  H01Q1/52 ,  H01Q9/02 ,  H01Q21/00 ,  H01Q21/06

CPC classification number: G01N22/00 ,  H01J37/3222 ,  H01J37/32715 ,  H01J37/32935 ,  H01L21/6833 ,  H01Q1/24 ,  H01Q1/523 ,  H01Q1/525 ,  H01Q9/02 ,  H01Q21/0031 ,  H01Q21/065 ,  H01J2237/2007

Abstract: The present invention relates to a planar-type plasma diagnosis apparatus comprising: a transmission antenna for applying a frequency-variable microwave to plasma; a reception antenna for receiving the microwave from the plasma; and a body part encompassing the transmission antenna and the reception antenna so that same are insulated from each other, wherein the upper surface of the transmission antenna for applying the microwave and the upper surface of the reception antenna for receiving the microwave are planar, and side surfaces of the upper surfaces of the transmission antenna and the reception antenna face each other.