公开(公告)号：WO2014025149A1

公开(公告)日：2014-02-13

申请号：PCT/KR2013/006711

申请日：2013-07-26

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： RHEE, Hyug-Gyo ,  YANG, Ho Soon ,  GHIM, Young Sik ,  LEE, Yun Woo

IPC: G02B5/18 ,  G03F7/26

CPC classification number: G02B5/1871 ,  G02B5/1857 ,  G03F7/70383

Abstract: The present invention relates to an apparatus for manufacturing a phase-type diffraction element using a direct laser exposure method, a method of manufacturing a phase-type diffraction element, and a phase-type diffraction element using a direct laser exposure method. More specifically, the present invention relates to an apparatus and method for manufacturing a phase-type diffraction element by radiating a laser beam on a substrate formed of photo-curable resin.

Abstract translation: 本发明涉及一种使用直接激光曝光方法制造相位衍射元件的装置，相型衍射元件的制造方法和使用直接激光曝光法的相位衍射元件。 更具体地，本发明涉及通过在由光固化树脂形成的基板上照射激光束来制造相型衍射元件的装置和方法。

公开(公告)号：WO2015064957A1

公开(公告)日：2015-05-07

申请号：PCT/KR2014/009999

申请日：2014-10-23

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： LEE, Joo-Hyung ,  RHEE, Hyug-Gyo ,  GHIM, Young-Sik ,  YANG, Ho-Soon

IPC: H01S3/067 ,  H01S3/083 ,  H01S3/10

CPC classification number: H01S3/06791 ,  H01S3/08054 ,  H01S3/105 ,  H01S3/1115

Abstract: Provided is a dual optical-comb femtosecond optical fiber laser that includes an optical fiber resonator maintained at a polarization state, a wavelength division multiplexing coupler (WDM coupler) mounted on the optical fiber resonator to provide pump light to the optical fiber resonator, a pump light source adapted to output the pump light, a gain medium doping optical fiber, mode-locking means mounted on the optical fiber resonator to induce mode-locking, an isolator mounted on the optical fiber resonator to make light traveling into the optical fiber resonator travel in one direction, and a birefringent element mounted on the optical fiber resonator to provide different refractive indices according to a polarization state of the light traveling into the optical fiber resonator.

Abstract translation: 提供了一种包括保持在偏振状态的光纤谐振器的双光梳飞秒光纤激光器，安装在光纤谐振器上的波分复用耦合器（WDM耦合器），以向光纤谐振器提供泵浦光，泵 适于输出泵浦光的光源，增益介质掺杂光纤，安装在光纤谐振器上的模锁定装置以引起锁模，安装在光纤谐振器上的隔离器，以使光进入光纤谐振器行进 以及安装在光纤谐振器上的双折射元件，以根据传入光纤谐振器的光的偏振状态提供不同的折射率。

公开(公告)号：WO2013058471A1

公开(公告)日：2013-04-25

申请号：PCT/KR2012/005899

申请日：2012-07-24

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE ,  RHEE, Hyug-Gyo ,  LEE, Yun Woo

Inventor： RHEE, Hyug-Gyo ,  LEE, Yun Woo

IPC: G03F7/20 ,  G03F7/26 ,  H01L21/027

CPC classification number: B29C59/16 ,  G03F7/70383 ,  G03F7/70408 ,  G03F7/70566

Abstract: The present invention relates to a fine pattern manufacturing apparatus using interference and a fine pattern manufacturing method using the fine pattern manufacturing apparatus, which can improve height direction resolution in a laser irradiation method. More specifically, the invention relates to a fine pattern manufacturing apparatus using interference and a fine pattern manufacturing method using the manufacturing apparatus, in which a height direction interference generation unit is included to interfere laser beams respectively having a different plane direction width, and height direction line width can be improved by irradiating an interference laser beam having an interference fringe direction of height direction on a photosensitive film.

Abstract translation: 本发明涉及使用干涉的精细图案制造装置和使用精细图案制造装置的精细图案制造方法，其能够提高激光照射方法中的高度方向分辨率。 更具体地，本发明涉及使用干涉的精细图案制造装置和使用该制造装置的精细图案制造方法，其中包括高度方向干涉产生单元以干扰分别具有不同的平面方向宽度的激光束和高度方向 可以通过在感光膜上照射具有高度方向的干涉条纹方向的干涉激光束来提高线宽。

公开(公告)号：WO2012057388A1

公开(公告)日：2012-05-03

申请号：PCT/KR2010/007982

申请日：2010-11-12

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE ,  RHEE, Hyug-Gyo ,  LEE, Yun-Woo

Inventor： RHEE, Hyug-Gyo ,  LEE, Yun-Woo

IPC: H01L21/027 ,  G03F7/20

CPC classification number: G03F7/70308 ,  G03F7/2053 ,  G03F7/70141 ,  G03F7/70191 ,  G03F7/70383 ,  G03F7/70566

Abstract: An apparatus for forming fine patterns by employing polarization interference in a laser scanning method comprises a laser generator; a calcite wave plate configured to refract at least one of the S wave and the P wave, polarized by the polarization plate, an analyzer configured to make coincident with each other the polarization directions of the S wave and the P wave having the paths spaced apart from each other by the calcite wave plate; an exposure lens; an exposure head; an X stage; and a rotation stage configured to move the substrate mounting unit around a Z axis which is a vertical axis.

Abstract translation: 一种用于通过在激光扫描方法中使用偏振干涉来形成精细图案的装置包括：激光发生器; 被配置为折射由偏振板极化的S波和P波中的至少一个的方解石波片，被配置为使S波的极化方向和具有间隔开的路径的P波彼此一致的分析器 由方解石波片相互作用; 曝光镜片; 曝光头; X阶段 以及旋转台，被配置为使基板安装单元围绕作为垂直轴的Z轴移动。