公开(公告)号：US11852581B2

公开(公告)日：2023-12-26

申请号：US17338539

申请日：2021-06-03

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Kyung Joong Kim ,  Gyea Young Kwak ,  Taegun Kim ,  Hyungung Yu ,  Seung Mi Lee

IPC: G01N21/27 ,  G01Q40/02 ,  B82Y35/00 ,  G01Q60/24 ,  H01J37/28

CPC classification number: G01N21/274 ,  G01Q40/02 ,  B82Y35/00 ,  G01Q60/24 ,  H01J37/28

Abstract: Provided is a method of calibrating a nano measurement scale using a standard material including: measuring widths of a plurality of nanostructures included in the standard material and having pre-designated certified values of different sizes by a microscope; determining measured values for the widths of each of the plurality of nanostructures measured by the microscope based on a predetermined criterion; and calibrating a measurement scale of the microscope based on the certified values and the measured values.