公开(公告)号：EP3706159A1

公开(公告)日：2020-09-09

申请号：EP18874845.3

申请日：2018-11-01

Applicant: Korea Basic Science Institute

Inventor： CHOI, Yong Sup ,  LEE, Kang Il ,  SEOK, Dong Chan ,  JANG, Soo Ouk ,  KIM, Jong Sik ,  YOO, Seung Ryul

IPC: H01L21/3105 ,  H01L21/311 ,  H01L21/02 ,  H01L21/67

Abstract: The present invention relates to an atomic layer polishing method comprising: the steps of: scanning the surface of a specimen to measure a peak site on the specimen surface; spraying toward the measured peak site a gas containing an element capable of binding to a first atom, which is an ingredient of the material of the specimen to form a first reaction gas layer in which the first reaction gas binds to the first atom on the surface of the peak; and projecting ions of inert gas to the peak site on which the first reaction gas layer is deposited to separate the first atom bound to the first reaction gas from the specimen.

公开(公告)号：EP2475230A2

公开(公告)日：2012-07-11

申请号：EP10813882.7

申请日：2010-07-21

Applicant: Korea Basic Science Institute

Inventor： SEOK, Dong Chan ,  LOH, Tai Hyeop ,  YOO, Seung Ryul ,  HONG, Yong Cheol ,  LEE, Bong Ju

IPC: H05H1/34

CPC classification number: H05H1/2406 ,  H05H2001/2412

Abstract: The present invention relates to a liquid medium plasma discharge generating apparatus, and has the aim of providing a microtube liquid medium plasma discharge generating apparatus, capable of applying a high electric field even with low wattage by minimizing conduction current, by filling a liquid medium in a gap between a power electrode and a ground electrode and arranging a dielectric diaphragm member, defining one or more holes or slits, in the middle of the gap. To achieve the above aim, the present invention provides a liquid medium plasma discharge generating apparatus comprising: a main body; a power electrode, provided at one side within the main body, for receiving electric power; a diaphragm member provided within the main body, and consisting of a dielectric defining one or more holes or slits; and a liquid medium charged inside the main body, wherein a ground electrode may be further provided in the main body, opposite the power electrode with the diaphragm member therebetween, whereupon the diaphragm member is arranged contacting the ground electrode.

Abstract translation: 液体介质等离子体放电发生装置技术领域本发明涉及一种液体介质等离子体放电发生装置，其目的在于提供一种微管液体介质等离子体放电发生装置，其能够通过使传导电流最小化而使低功率的电场通过将液体介质 功率电极和接地电极之间的间隙，并且在间隙的中间布置限定一个或多个孔或狭缝的电介质膜构件。 为了实现上述目的，本发明提供一种液体介质等离子体放电产生装置，包括：主体; 电源电极，设置在主体内的一侧，用于接收电力; 隔膜构件，设置在主体内，并由限定一个或多个孔或狭缝的电介质构成; 以及填充在主体内部的液体介质，其中，可以在主体中进一步设置接地电极，与功率电极相对，隔膜构件在其间，隔膜构件与接地电极接触。