公开(公告)号：EP3706159A1

公开(公告)日：2020-09-09

申请号：EP18874845.3

申请日：2018-11-01

Applicant: Korea Basic Science Institute

Inventor： CHOI, Yong Sup ,  LEE, Kang Il ,  SEOK, Dong Chan ,  JANG, Soo Ouk ,  KIM, Jong Sik ,  YOO, Seung Ryul

IPC: H01L21/3105 ,  H01L21/311 ,  H01L21/02 ,  H01L21/67

Abstract: The present invention relates to an atomic layer polishing method comprising: the steps of: scanning the surface of a specimen to measure a peak site on the specimen surface; spraying toward the measured peak site a gas containing an element capable of binding to a first atom, which is an ingredient of the material of the specimen to form a first reaction gas layer in which the first reaction gas binds to the first atom on the surface of the peak; and projecting ions of inert gas to the peak site on which the first reaction gas layer is deposited to separate the first atom bound to the first reaction gas from the specimen.

公开(公告)号：EP2929932A1

公开(公告)日：2015-10-14

申请号：EP13862200.6

申请日：2013-12-06

Applicant: Korea Basic Science Institute

Inventor： SEOK, Dong Chan ,  JUNG, Yong Ho ,  JEONG, Hyun Young

IPC: B01J19/08 ,  B01J2/00 ,  H05H1/42

CPC classification number: H01J37/32532 ,  B01J19/088 ,  B01J2219/083 ,  B01J2219/0879 ,  H01J37/32009 ,  H01J37/32348 ,  H01J37/32568 ,  H05H1/2406 ,  H05H2001/2412 ,  H05H2001/2431

Abstract: A powder plasma processing apparatus is disclosed. The powder plasma processing apparatus is a powder plasma processing apparatus of a cylindrical surface discharge plasma module, and the apparatus includes a plate-like electrode layer serving as an external surface of the cylindrical surface discharge plasma module, an insulating layer disposed on an internal surface of the plate-like electrode layer, and a plasma generating electrode disposed on the insulating layer, wherein the cylindrical surface discharge plasma module rotates, an alternating voltage is applied to the plasma generating electrode and the plate-like electrode layer to generate plasma around the plasma generating electrode, and a powder for plasma processing is processed by the plasma within the cylindrical surface discharge plasma module.

Abstract translation: 公开了一种粉末等离子体处理设备。 粉末等离子体处理装置是圆筒形表面放电等离子体模块的粉末等离子体处理装置，并且该装置包括用作圆柱形表面放电等离子体模块的外表面的板状电极层，设置在内表面上的绝缘层 以及设置在所述绝缘层上的等离子体产生电极，其中所述圆柱形表面放电等离子体模块旋转，交流电压施加到所述等离子体产生电极和所述板状电极层，以在所述等离子体产生电极和所述板状电极层周围产生等离子体 等离子体产生电极和用于等离子体处理的粉末由圆柱面放电等离子体模块内的等离子体处理。

公开(公告)号：EP2929932B1

公开(公告)日：2018-04-04

申请号：EP13862200.6

申请日：2013-12-06

Applicant: Korea Basic Science Institute

Inventor： SEOK, Dong Chan ,  JUNG, Yong Ho ,  JEONG, Hyun Young

IPC: B01J19/08 ,  B01J2/00 ,  H05H1/42 ,  H05H1/24 ,  H01J37/32

CPC classification number: H01J37/32532 ,  B01J19/088 ,  B01J2219/083 ,  B01J2219/0879 ,  H01J37/32009 ,  H01J37/32348 ,  H01J37/32568 ,  H05H1/2406 ,  H05H2001/2412 ,  H05H2001/2431

Abstract: A powder plasma processing apparatus is disclosed. The powder plasma processing apparatus is a powder plasma processing apparatus of a cylindrical surface discharge plasma module, and the apparatus includes a plate-like electrode layer serving as an external surface of the cylindrical surface discharge plasma module, an insulating layer disposed on an internal surface of the plate-like electrode layer, and a plasma generating electrode disposed on the insulating layer, wherein the cylindrical surface discharge plasma module rotates, an alternating voltage is applied to the plasma generating electrode and the plate-like electrode layer to generate plasma around the plasma generating electrode, and a powder for plasma processing is processed by the plasma within the cylindrical surface discharge plasma module.

公开(公告)号：EP2929933A1

公开(公告)日：2015-10-14

申请号：EP13862922.5

申请日：2013-12-06

Applicant: Korea Basic Science Institute

Inventor： SEOK, Dong Chan ,  JUNG, Yong Ho ,  JEONG, Hyun Young

IPC: B01J19/08 ,  B01J2/00 ,  H05H1/42

CPC classification number: H01J37/32568 ,  B01J19/088 ,  B01J2219/0835 ,  B01J2219/0879 ,  H01J37/32348 ,  H05H1/48 ,  H05H2001/2412

Abstract: A powder plasma processing apparatus is disclosed. The powder plasma processing apparatus includes: a chamber configured to perform plasma processing on a powder; a powder supply unit disposed in an upper portion of the chamber; and a plurality of plate-like surface discharge plasma modules disposed below the powder supply unit and positioned within the chamber, wherein surfaces of the surface discharge plasma modules are spaced apart from each other. According to the powder plasma processing apparatus, the powder can be uniformly processed, and the time that the powder spends in contact with the plasma can be controlled, thereby allowing efficient powder processing to be performed.

Abstract translation: 公开了粉末等离子体处理装置。 粉末等离子体处理装置包括：室，被配置为对粉末进行等离子体处理; 设置在所述室的上部的粉末供给单元; 以及多个板状表面放电等离子体模块，其设置在所述粉末供给单元的下方并且位于所述室内，其中所述表面放电等离子体模块的表面彼此间隔开。 根据粉末等离子体处理装置，可以均匀地加工粉末，并且可以控制粉末与等离子体接触的时间，从而允许进行有效的粉末处理。

公开(公告)号：EP2716305B1

公开(公告)日：2016-03-30

申请号：EP12792482.7

申请日：2012-06-04

Applicant: Korea Basic Science Institute

Inventor： SEOK, Dong Chan ,  LHO, Tai Hyeop

IPC: A61L2/22 ,  A61L2/14 ,  A61L2/12 ,  A61L2/26

CPC classification number: A61L2/14 ,  A61L2/208 ,  A61L2202/11 ,  A61L2202/24 ,  H05H1/46 ,  H05H2001/4622 ,  H05H2245/1225

Abstract: The present invention relates to an apparatus for sterilization which may be applied to a medical dry sterilizer, and more particularly, to an apparatus which injects hydrogen peroxide so as to generate plasma and OH radicals which are effective in sterilization, so as to achieve the sterilization of a treated object. According to the present invention, the apparatus for sterilization comprises: a sterilizing reactor in which sterilization is performed on a treated object; a vacuuming unit which is equipped with a vacuum pump connected to the sterilizing reactor and which vacuumizes the interior of the sterilizing reactor; a hydrogen-peroxide supply unit which supplies hydrogen peroxide in a gas state to the interior of the sterilizing reactor; and a microwave-plasma generating unit which generates plasma using microwaves. The microwave-plasma generating unit is provided with an electromagnetic-wave generating source which generates microwaves; a plasma-generating unit which interconnects the hydrogen-peroxide supply unit and the sterilizing reactor such that hydrogen peroxide is supplied to the sterilizing reactor, and which generates plasma using microwaves; and a microwave guide which delivers the microwaves generated from the electromagnetic-wave generating source to the plasma-generating unit.

公开(公告)号：EP2716305A1

公开(公告)日：2014-04-09

申请号：EP12792482.7

申请日：2012-06-04

Applicant: Korea Basic Science Institute

Inventor： SEOK, Dong Chan ,  LHO, Tai Hyeop

IPC: A61L2/22 ,  A61L2/14 ,  A61L2/12 ,  A61L2/26

CPC classification number: A61L2/14 ,  A61L2/208 ,  A61L2202/11 ,  A61L2202/24 ,  H05H1/46 ,  H05H2001/4622 ,  H05H2245/1225

Abstract: The present invention relates to an apparatus for sterilization which may be applied to a medical dry sterilizer, and more particularly, to an apparatus which injects hydrogen peroxide so as to generate plasma and OH radicals which are effective in sterilization, so as to achieve the sterilization of a treated object. According to the present invention, the apparatus for sterilization comprises: a sterilizing reactor in which sterilization is performed on a treated object; a vacuuming unit which is equipped with a vacuum pump connected to the sterilizing reactor and which vacuumizes the interior of the sterilizing reactor; a hydrogen-peroxide supply unit which supplies hydrogen peroxide in a gas state to the interior of the sterilizing reactor; and a microwave-plasma generating unit which generates plasma using microwaves. The microwave-plasma generating unit is provided with an electromagnetic-wave generating source which generates microwaves; a plasma-generating unit which interconnects the hydrogen-peroxide supply unit and the sterilizing reactor such that hydrogen peroxide is supplied to the sterilizing reactor, and which generates plasma using microwaves; and a microwave guide which delivers the microwaves generated from the electromagnetic-wave generating source to the plasma-generating unit.

Abstract translation: 本发明涉及可应用于医用干式灭菌器的灭菌装置，更具体地，涉及注射过氧化氢以产生有效灭菌的等离子体和OH自由基的装置，以实现灭菌 的处理对象。 根据本发明，灭菌装置包括：灭菌反应器，其对被处理物进行灭菌; 一个抽真空装置，它装有一个与杀菌反应器连接的真空泵，并对灭菌反应器的内部进行真空化; 过氧化氢供给单元，其将气态的过氧化氢供给到灭菌反应器的内部; 以及使用微波产生等离子体的微波等离子体生成单元。 微波等离子体产生单元设置有产生微波的电磁波发生源; 等离子体产生单元，其将过氧化氢供给单元和灭菌反应器相互连接，使得向杀菌反应器供给过氧化氢，并使用微波产生等离子体; 以及微波引导器，其将从电磁波发生源产生的微波输送到等离子体发生单元。

公开(公告)号：EP3255960A1

公开(公告)日：2017-12-13

申请号：EP16746881.8

申请日：2016-02-05

Applicant: Korea Basic Science Institute

Inventor： SEOK, Dong Chan ,  JUNG, Yong Ho ,  CHOI, Yong Sup ,  LHO, Taihyeop ,  LEE, Kang Il ,  JEONG, Hyun Young

IPC: H05H1/24 ,  H05H1/34

CPC classification number: H05H1/24 ,  H05H1/34

Abstract: The present invention is to provide a plasma-generating source including a porous dielectric member partially immersed in liquid into a plasma generation region between two opposite electrodes for generating dielectric barrier discharge plasma, such that generation of ozone and nitrogen oxides is suppressed while generation of hydroxy radicals is promoted.

Abstract translation: 本发明提供一种等离子体发生源，其包括部分浸入液体中的多孔电介质构件，进入两个相对电极之间的等离子体产生区，用于产生电介质阻挡放电等离子体，从而抑制臭氧和氮氧化物的产生，同时产生羟基 自由基得到促进。

公开(公告)号：EP2475230A2

公开(公告)日：2012-07-11

申请号：EP10813882.7

申请日：2010-07-21

Applicant: Korea Basic Science Institute

Inventor： SEOK, Dong Chan ,  LOH, Tai Hyeop ,  YOO, Seung Ryul ,  HONG, Yong Cheol ,  LEE, Bong Ju

IPC: H05H1/34

CPC classification number: H05H1/2406 ,  H05H2001/2412

Abstract: The present invention relates to a liquid medium plasma discharge generating apparatus, and has the aim of providing a microtube liquid medium plasma discharge generating apparatus, capable of applying a high electric field even with low wattage by minimizing conduction current, by filling a liquid medium in a gap between a power electrode and a ground electrode and arranging a dielectric diaphragm member, defining one or more holes or slits, in the middle of the gap. To achieve the above aim, the present invention provides a liquid medium plasma discharge generating apparatus comprising: a main body; a power electrode, provided at one side within the main body, for receiving electric power; a diaphragm member provided within the main body, and consisting of a dielectric defining one or more holes or slits; and a liquid medium charged inside the main body, wherein a ground electrode may be further provided in the main body, opposite the power electrode with the diaphragm member therebetween, whereupon the diaphragm member is arranged contacting the ground electrode.

Abstract translation: 液体介质等离子体放电发生装置技术领域本发明涉及一种液体介质等离子体放电发生装置，其目的在于提供一种微管液体介质等离子体放电发生装置，其能够通过使传导电流最小化而使低功率的电场通过将液体介质 功率电极和接地电极之间的间隙，并且在间隙的中间布置限定一个或多个孔或狭缝的电介质膜构件。 为了实现上述目的，本发明提供一种液体介质等离子体放电产生装置，包括：主体; 电源电极，设置在主体内的一侧，用于接收电力; 隔膜构件，设置在主体内，并由限定一个或多个孔或狭缝的电介质构成; 以及填充在主体内部的液体介质，其中，可以在主体中进一步设置接地电极，与功率电极相对，隔膜构件在其间，隔膜构件与接地电极接触。