公开(公告)号：US20030092268A1

公开(公告)日：2003-05-15

申请号：US09986506

申请日：2001-11-09

Applicant: Korea Institute of Science and Technology

Inventor： Sung Moon ,  Jong Yeon Park

IPC: H01L021/302 ,  H01L021/461

CPC classification number: B81C1/00111 ,  G03F7/70383 ,  G03F7/70425 ,  G03F7/707 ,  G03F7/70758

Abstract: The present invention relates to an exposure apparatus and a method for manufacturing 3-D horn antenna using the exposure apparatus. More particularly, it relates to a method for manufacturing a horn-shaped 3-D micro-structure antenna and an extremely low-speed, inclined-rotating, parallel exposure apparatus that makes it possible to manufacture the 3-D micro-structure antenna mentioned above.