公开(公告)号：US20040009622A1

公开(公告)日：2004-01-15

申请号：US10460176

申请日：2003-06-13

Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Sung Moon ,  Kun Tae Kim

IPC: H01L021/00

CPC classification number: G01J1/4228 ,  G01J1/0422 ,  G01J1/06 ,  G01J5/02 ,  G01J5/023 ,  G01J5/024 ,  G01J5/08 ,  G01J5/0815 ,  G01J5/0837 ,  G01J5/0853 ,  G01J2005/0077

Abstract: A manufacturing method for a three dimensional conical horn antenna coupled image detector includes depositing a sacrificial layer on the upper section of the substrate, and forming a pattern for the sacrificial layer is by performing a patterning process using the first etching mask. The method further includes depositing a first silicon nitride layer, forming a first silicon nitride layer, depositing a vanadium oxide layer, forming a vanadium oxide layer pattern, depositing a conductive layer, forming a conductive layer pattern, depositing a second silicon nitride layer, forming a second silicon nitride layer pattern, depositing a third silicon nitride layer, forming a side wall space pattern, and after the sacrificial layer is removed, performing an aligning process using a seventh etching mask.

Abstract translation: 一种用于三维锥形喇叭天线耦合图像检测器的制造方法，包括在衬底的上部上沉积牺牲层，并且通过使用第一蚀刻掩模进行构图处理，形成用于牺牲层的图案。 该方法还包括沉积第一氮化硅层，形成第一氮化硅层，沉积钒氧化物层，形成钒氧化物层图案，沉积导电层，形成导电层图案，沉积第二氮化硅层，形成 第二氮化硅层图案，沉积第三氮化硅层，形成侧壁空间图案，并且在除去牺牲层之后，使用第七蚀刻掩模执行对准处理。

公开(公告)号：US20030092268A1

公开(公告)日：2003-05-15

申请号：US09986506

申请日：2001-11-09

Applicant: Korea Institute of Science and Technology

Inventor： Sung Moon ,  Jong Yeon Park

IPC: H01L021/302 ,  H01L021/461

CPC classification number: B81C1/00111 ,  G03F7/70383 ,  G03F7/70425 ,  G03F7/707 ,  G03F7/70758

Abstract: The present invention relates to an exposure apparatus and a method for manufacturing 3-D horn antenna using the exposure apparatus. More particularly, it relates to a method for manufacturing a horn-shaped 3-D micro-structure antenna and an extremely low-speed, inclined-rotating, parallel exposure apparatus that makes it possible to manufacture the 3-D micro-structure antenna mentioned above.

公开(公告)号：US20030089842A1

公开(公告)日：2003-05-15

申请号：US09986507

申请日：2001-11-09

Applicant: Korea Institute of Science and Technology

Inventor： Sung Moon ,  Kun Tae Kim

IPC: G01J001/04 ,  G01J005/08

CPC classification number: G01J1/4228 ,  G01J1/0422 ,  G01J1/06 ,  G01J5/02 ,  G01J5/023 ,  G01J5/024 ,  G01J5/08 ,  G01J5/0815 ,  G01J5/0837 ,  G01J5/0853 ,  G01J2005/0077

Abstract: The present invention relates to three dimensional conical horn antenna coupled image detectors and the manufacturing method thereof. More specifically, the present invention relates to the method of manufacturing an image detector by coupling three dimensional conical horn antenna with the image detector which are constructed using the Micro Electro Mechanical System (MEMS) Technology that improves the sensitivity of the image detector.

Abstract translation: 本发明涉及三维圆锥喇叭天线耦合图像检测器及其制造方法。 更具体地，本发明涉及通过使用提高图像检测器的灵敏度的微机电系统（MEMS）技术构造的三维锥形喇叭天线与图像检测器耦合来制造图像检测器的方法。