公开(公告)号：SG115843A1

公开(公告)日：2005-10-28

申请号：SG200502559

申请日：2005-03-28

Applicant: LAM RES CORP

Inventor： MICHAEL RAVKIN ,  MICHAEL G R SMITH ,  JOHN M DE LARIOS ,  FRITZ REDEKER ,  MIKHAIL KOROLIK ,  CHRISTIAN DIPIETRO

IPC: B08B3/00 ,  B08B3/04 ,  C25D5/08 ,  C25D5/22 ,  C25D7/12 ,  C25D17/00 ,  H01L21/00 ,  H01L21/304 ,  H01L21/306

Abstract: Among the many embodiment, in one embodiment, a method for processing a substrate is disclosed which includes generating a fluid layer on a surface of the substrate, the fluid layer defining a fluid meniscus. The generating includes moving a head in proximity to the surface, applying a fluid from the head to the surface while the head is in proximity to the surface of the substrate to define the fluid layer, and removing the fluid from the surface through the proximity head by a vacuum. The fluid travels along the fluid layer between the head and the substrate at a velocity that increases as the head is in closer proximity to the surface.