公开(公告)号：WO0101454A9

公开(公告)日：2002-02-07

申请号：PCT/US0040191

申请日：2000-06-08

Applicant: LAM RES CORP

Inventor： KROEKER TONY R ,  COOK LARRY

IPC: B25J9/06 ,  B65G49/00 ,  B65G49/07 ,  H01L21/00 ,  H01L21/677

CPC classification number: H01L21/67167 ,  H01L21/67201 ,  H01L21/67766 ,  Y10S414/137 ,  Y10S414/139

Abstract: A load lock wafer transfer face is provided at an acute angle with respect to a footprint dimension line, so the length of the footprint dimension line does not include the entire minimum length of the wafer transfer distance that must separate a robot from the wafer transfer face of a load lock. Two adjacent load locks provided for use with a robot have two load lock wafer transfer faces defining a nest, in that each such face is at an acute angle with respect to the footprint dimension line. A robot is mounted for rotation at a fixed location relative to wafer cassettes and to the nested load lock wafer transfer faces, avoiding use of a robot track to move transversely. Because the faces are at the acute angle, there is only a component of, and not the entire, minimum wafer transfer distance extending in the direction of the footprint dimension line. The robot is positioned at least partly in the nest formed by the adjacent load lock faces without requiring rotation of the base of the robot on a vertical axis at the same time as the arms of the robot are moved in an extend motion during wafer transfer into the load lock. The footprint of the modules may be substantially reduced, in that at least one dimension of the footprint is minimized, yet the robot may operate with only relatively simple extend motion to transfer the wafers into the load locks, avoiding more complex motions that include both transverse motion (i.e., on a linear track), and rotate motion.

Abstract translation: 相对于占地面积尺寸线以锐角设置负载锁定晶片传送面，因此覆盖尺寸线的长度不包括必须将机器人与晶片传送面分开的晶片传送距离的整个最小长度 的加载锁。 提供用于机器人的两个相邻的加载锁具有两个限定嵌套的装载锁定晶片传送面，其中每个这样的面相对于印迹尺寸线处于锐角。 安装机器人以相对于晶片盒和固定的负载锁定晶片传送面在固定位置旋转，避免使用机器人轨道横向移动。 因为这些面是锐角，所以只有一部分的最小晶片传输距离在占用空间尺寸线的方向上延伸而不是整个。 机器人至少部分地位于由相邻的装载锁定面形成的座中，而不需要在机器人的臂在晶片转移期间以伸展运动移动的同时在垂直轴上旋转机器人的基座 加载锁定。 模块的占地面积可以大大降低，因为足迹的至少一个尺寸被最小化，但是机器人可以仅使用相对简单的延伸运动来操作以将晶片转移到负载锁中，从而避免更复杂的运动，包括横向 运动（即在线性轨迹上），并旋转运动。

公开(公告)号：WO0101454A2

公开(公告)日：2001-01-04

申请号：PCT/US0040191

申请日：2000-06-08

Applicant: LAM RES CORP

Inventor： KROEKER TONY R ,  COOK LARRY

IPC: B25J9/06 ,  B65G49/00 ,  B65G49/07 ,  H01L21/00 ,  H01L21/677 ,  H01L

CPC classification number: H01L21/67167 ,  H01L21/67201 ,  H01L21/67766 ,  Y10S414/137 ,  Y10S414/139

Abstract: A load lock wafer transfer face is provided at an acute angle with respect to a footprint dimension line, so the length of the footprint dimension line does not include the entire minimum length of the wafer transfer distance that must separate a robot from the wafer transfer face of a load lock. Two adjacent load locks provided for use with a robot have two load lock wafer transfer faces defining a nest, in that each such face is at an acute angle with respect to the footprint dimension line. A robot is mounted for rotation at a fixed location relative to wafer cassettes and to the nested load lock wafer transfer faces, avoiding use of a robot track to move transversely. Because the faces are at the acute angle, there is only a component of, and not the entire, minimum wafer transfer distance extending in the direction of the footprint dimension line. The robot is positioned at least partly in the nest formed by the adjacent load lock faces without requiring rotation of the base of the robot on a vertical axis at the same time as the arms of the robot are moved in an extend motion during wafer transfer into the load lock. The footprint of the modules may be substantially reduced, in that at least one dimension of the footprint is minimized, yet the robot may operate with only relatively simple extend motion to transfer the wafers into the load locks, avoiding more complex motions that include both transverse motion (i.e., on a linear track), and rotate motion.

Abstract translation: 加载锁定晶片传送面相对于覆盖区尺寸线成锐角设置，因此覆盖区尺寸线的长度不包括必须将机器人与晶片传送面分开的晶片传送距离的整个最小长度 的加载锁。 提供与机器人一起使用的两个相邻的加载锁具有限定嵌套的两个加载锁定晶片传送面，其中每个这样的面相对于覆盖区尺寸线成锐角。 机器人被安装用于在相对于晶片盒和嵌套的负载锁定晶片传递面的固定位置旋转，避免使用机器人轨道横向移动。 因为这些面是锐角的，所以只有一部分（而不是整个）最小晶片传输距离在占地面积尺寸线的方向上延伸。 机器人至少部分地定位在由相邻加载锁定面形成的嵌套中，而不需要机器人在竖直轴线上的旋转，同时机器人的臂在晶片传送期间以伸展运动移动到竖直轴上 加载锁。 模块的占地面积可以显着减小，因为占地面积的至少一个尺寸被最小化，然而机器人可以仅用相对简单的伸展运动来操作以将晶片传送到负载锁中，从而避免更复杂的运动，其包括横向 运动（即，在线性轨道上）以及旋转运动。

公开(公告)号：AU6802200A

公开(公告)日：2001-01-31

申请号：AU6802200

申请日：2000-06-08

Applicant: LAM RES CORP

Inventor： KROEKER TONY R ,  COOK LARRY

IPC: B25J9/06 ,  B65G49/00 ,  B65G49/07 ,  H01L21/00 ,  H01L21/677

Abstract: A load lock wafer transfer face is provided at an acute angle with respect to a footprint dimension line, so the length of the footprint dimension line does not include the entire minimum length of the wafer transfer distance that must separate a robot from the wafer transfer face of a load lock. Two adjacent load locks provided for use with a robot have two load lock wafer transfer faces defining a nest, in that each such face is at an acute angle with respect to the footprint dimension line. A robot is mounted for rotation at a fixed location relative to wafer cassettes and to the nested load lock wafer transfer faces, avoiding use of a robot track to move transversely. Because the faces are at the acute angle, there is only a component of, and not the entire, minimum wafer transfer distance extending in the direction of the footprint dimension line. The robot is positioned at least partly in the nest formed by the adjacent load lock faces without requiring rotation of the base of the robot on a vertical axis at the same time as the arms of the robot are moved in an extend motion during wafer transfer into the load lock. The footprint of the modules may be substantially reduced, in that at least one dimension of the footprint is minimized, yet the robot may operate with only relatively simple extend motion to transfer the wafers into the load locks, avoiding more complex motions that include both transverse motion (i.e., on a linear track) and rotate motion.

公开(公告)号：IL147278A

公开(公告)日：2005-09-25

申请号：IL14727800

申请日：2000-06-08

Applicant: LAM RES CORP

Inventor： KROEKER TONY R ,  COOK LARRY

IPC: B65G49/00 ,  B25J9/06 ,  B65G49/07 ,  H01L21/00 ,  H01L21/677 ,  H01L21/68

Abstract: A load lock wafer transfer face is provided at an acute angle with respect to a footprint dimension line, so the length of the footprint dimension line does not include the entire minimum length of the wafer transfer distance that must separate a robot from the wafer transfer face of a load lock. Two adjacent load locks provided for use with a robot have two load lock wafer transfer faces defining a nest, in that each such face is at an acute angle with respect to the footprint dimension line. A robot is mounted for rotation at a fixed location relative to wafer cassettes and to the nested load lock wafer transfer faces, avoiding use of a robot track to move transversely. Because the faces are at the acute angle, there is only a component of, and not the entire, minimum wafer transfer distance extending in the direction of the footprint dimension line. The robot is positioned at least partly in the nest formed by the adjacent load lock faces without requiring rotation of the base of the robot on a vertical axis at the same time as the arms of the robot are moved in an extend motion during wafer transfer into the load lock. The footprint of the modules may be substantially reduced, in that at least one dimension of the footprint is minimized, yet the robot may operate with only relatively simple extend motion to transfer the wafers into the load locks, avoiding more complex motions that include both transverse motion (i.e., on a linear track) and rotate motion.

公开(公告)号：MY117518A

公开(公告)日：2004-07-31

申请号：MYPI20002973

申请日：2000-06-29

Applicant: LAM RES CORP

Inventor： KROEKER TONY R ,  COOK LARRY

IPC: B25J9/06 ,  B65G49/00 ,  B65G49/07 ,  H01L21/00 ,  H01L21/677

Abstract: A LOAD LOCK WAFER TRANSFER FACE (216) IS PROVIDED AT AN ACUTE ANGLE WITH RESPECT TO A FOOTPRINT DIMENSION LINE (228), SO THE LENGTH OF A DISTANCE (230) ALONG THE FOOTPRINT DIMENSION LINE (228) DOES NOT INCLUDE THE ENTIRE MINIMUM LENGTH OF THE WAFER TRANSFER DISTANCE (127) THAT MUST SEPARATE A ROBOT (212) FROM THE WAFER TRANSFER FACE (216) OF A LOAD LOCK (204). TWO ADJACENT LOAD LOCKS (204) PROVIDED FOR USE WITH A ROBOT (212) HAVE TWO LOAD LOCK WAFER TRANSFER FACES (216) DEFINING A NEST (248), IN THAT EACH SUCH FACE (216) IS AT AN CUTE ANGLE WITH RESPECT TO THE FOOTPRINT DIMENSION LINE (228). A ROBOT (212) IS MOUNTED FOR ROTATION AT AFIXED LOCATION RELATIVE TO WAFER CASSETTES (210) AND TO THE NESTED LOAD LOCK WAFER TRANSFER FACES (216), AVOIDING USE OF A ROBOT TRACK (112) TO MOVE TRANSVERSELY. BECAUSE THE FACES (216) ARE AT ACUTE ANGLE, THERE IS ONLY A COMPONENT (232) OF, AND NOT THE ENTIRE, MINIMUM WAFER TRANSFER DISTANCE (127) EXTENDING IN THE DIRECTION OF THE FOOTPRINT DIMENSION LINE (228). THE ROBOT (212) IS POSITIONED AT LEAST PARTLY IN THE NEST (248) FORMED BY THE ADJACENT LOAD LOCK FACES (216) WITHOUT REQUIRING ROTATION OF THE BASE (260) OF THE ROBOT (212) ON A VERTICAL AXIS (214) AT THE SAME TIME AS THE ARMS OF THE ROBOT (212) ARE MOVED IN AN EXTEND MOTION DURING WAFER TRANSFER INTO THE LOAD LOCK (204). A FOOTPRINT OF A SYSTEM INCLUDING THE LOAD LOCKS MAY BE SUBSTANTIALLY REDUCED, IN THAT AT LEAST ONE DIMENSION OF THE FOOTPRINT IS MINIMIZED, YET THE ROBOT (212) MAY OPERATE WITH ONLY RELATIVELY SIMPLE EXTEND MOTION TO TRANSFER THE WAFER (208) INTO THE LOAD LOCKS (204), AVOIDING MORE COMPLEX MOTIONS THAT INCLUDE BOTH TRANSVERSE MOTION (I.E., ON A LINEAR TRACK) AND ROTATE MOTION.FIGURE 2A