公开(公告)号：AT447238T

公开(公告)日：2009-11-15

申请号：AT04815000

申请日：2004-12-20

Applicant: LAM RES CORP

Inventor： DAVIS GLENN ,  WOODS CARL ,  PARKS JOHN ,  REDEKER FRED ,  RAVKIN MIKE ,  ORBOCK MICHAEL

IPC: H01L21/00 ,  H01L21/687

Abstract: A apparatus for drying a substrate includes a vacuum manifold positioned adjacent to an edge wheel. The edge wheel includes an edge wheel groove for receiving a peripheral edge of a substrate, and the edge wheel is capable of rotating the substrate at a desired set velocity. The vacuum manifold includes a proximity end having one or more vacuum ports defined therein. The proximity end is positioned at least partially within the edge wheel groove, and using supplied vacuum removes fluids that accumulate in the edge wheel groove and prevents re-deposit of trapped fluids around the peripheral edge of the substrate.