公开(公告)号：WO2006065507A2

公开(公告)日：2006-06-22

申请号：PCT/US2005042918

申请日：2005-11-28

Applicant: LAM RES CORP ,  OWCZARZ ALEKSANDER ,  WINNICZEK JAROSLAW W ,  NASSER LUAI ,  SCHOEPP ALAN ,  REDEKER FRED C ,  EDELBERG ERIK

Inventor： OWCZARZ ALEKSANDER ,  WINNICZEK JAROSLAW W ,  NASSER LUAI ,  SCHOEPP ALAN ,  REDEKER FRED C ,  EDELBERG ERIK

IPC: H04N7/18 ,  H04N9/47

CPC classification number: G01N21/9501 ,  G01N2021/8822

Abstract: A system for inspecting a substrate includes a camera and a light source. The camera is oriented toward a field of view. The field of view encompasses at least a first portion of a first surface of the substrate. The light source is oriented toward the field of view at a first angle ß relative to the first surface of the substrate. A method for inspecting a substrate is also included.

Abstract translation: 用于检查基板的系统包括照相机和光源。 相机朝向视场。 该视场包括该基板的第一表面的至少第一部分。 光源相对于基板的第一表面以第一角度β朝向视场。 也包括检查基板的方法。

公开(公告)号：WO2006065507A9

公开(公告)日：2006-08-17

申请号：PCT/US2005042918

申请日：2005-11-28

Applicant: LAM RES CORP ,  OWCZARZ ALEKSANDER ,  WINNICZEK JAROSLAW W ,  NASSER LUAI ,  SCHOEPP ALAN ,  REDEKER FRED C ,  EDELBERG ERIK

Inventor： OWCZARZ ALEKSANDER ,  WINNICZEK JAROSLAW W ,  NASSER LUAI ,  SCHOEPP ALAN ,  REDEKER FRED C ,  EDELBERG ERIK

IPC: H04N7/18 ,  H04N9/47

CPC classification number: G01N21/9501 ,  G01N2021/8822

Abstract: A system for inspecting a substrate includes a camera and a light source. The camera is oriented toward a field of view. The field of view encompasses at least a first portion of a first surface of the substrate. The light source is oriented toward the field of view at a first angle ß relative to the first surface of the substrate. A method for inspecting a substrate is also included.

Abstract translation: 用于检查基板的系统包括照相机和光源。 相机朝向一个视野。 视场包含衬底的第一表面的至少第一部分。 光源相对于基板的第一表面以第一角度β朝向视场。 还包括用于检查衬底的方法。

公开(公告)号：MY140134A

公开(公告)日：2009-11-30

申请号：MYPI20055847

申请日：2005-12-13

Applicant: LAM RES CORP

Inventor： OWCZARZ ALEKSANDER ,  WINNICZEK JAROSLAW W ,  NASSER LUAI ,  SCHOEPP ALAN ,  REDEKER FRED C ,  EDELBERG ERIK

IPC: G01N21/00

Abstract: 2 1 SVSTEM, METHOD AND APPARATUS FOR IN-SITU SUBSTRATE INSPECTION ABSTRACT OF THE DISCLOSURE A SYSTERN FOR INSPECTINGA SUBSTRATE INCLUDES A CAMERA AND A LIGHT SOURCE. THE CAMERA 5 IS ORIENTED TOWARD A FIELD OF IEV. THE FIELD OF VIEW ENCOMPASSES AT LEAST A FIRST PORTION OF A FIRST SURFACE OF THE SUBSTRATE. THE TIGHT SOURCE IS ORIENTED TOWARD THE FIELD OF VIEW AT A FIRST ANGLE P RELATIVE TO THE FIRST SURFACE OF THE SUBSTRATE. A METHOD FOR INSPECTING A SUBSTRATE IS ALSO INCLUDED. H (/0 -@