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公开(公告)号：SG10201708419TA
公开(公告)日：2017-11-29
申请号：SG10201708419T
申请日：2014-04-04
Applicant: LAM RES CORP
Inventor： PATERSON ALEX , KIM DO YOUNG , KAMARTHY GOWRI , DEL PUPPO HELENE , YU JEN-KAN , TITUS MONICA , MANI RADHIKA , SUN NOEL YUI , GANI NICOLAS , KIMURA YOSHIE , CHUNG TING-YING
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