公开(公告)号：WO2012061362A3

公开(公告)日：2012-09-07

申请号：PCT/US2011058745

申请日：2011-11-01

Applicant: LAM RES CORP ,  LA CROIX CLIFF ,  AVOYAN ARMEN ,  OUTKA DUANE ,  ZHOU CATHERINE ,  SHIH HONG

Inventor： LA CROIX CLIFF ,  AVOYAN ARMEN ,  OUTKA DUANE ,  ZHOU CATHERINE ,  SHIH HONG

IPC: H01L21/304

CPC classification number: B24B37/30 ,  B24B41/061

Abstract: In one embodiment, an electrode polishing assembly may include an electrode securing platen, a plurality of electrode locating fasteners, and an electrode. Each of the electrode locating fasteners may include an electrode spacing shoulder, a variance cancelling shoulder extending from the electrode spacing shoulder, a threaded platen clamping portion extending from the variance cancelling shoulder, and a threaded nut that engages the threaded platen clamping portion. The electrode locating fasteners clamp the electrode securing platen between the threaded nut and the electrode spacing shoulder. The variance cancelling shoulder is at least partially within one of a plurality of variance cancelling passages of the electrode securing platen. A minimum position stack-up is equal to a minimum passage size minus a maximum shoulder size. A maximum position stack-up is equal to a maximum passage size minus a minimum shoulder size. The maximum position stack-up is greater than the minimum position stack-up.

Abstract translation: 在一个实施例中，电极抛光组件可以包括电极固定台板，多个电极定位紧固件和电极。 每个电极定位紧固件可以包括电极间隔肩部，从电极间隔肩部延伸的变化抵消肩部，从变化抵消肩部延伸的螺纹压板夹紧部分以及与螺纹压板夹紧部分接合的螺纹螺母。 电极定位紧固件将电极固定板夹紧在螺母和电极间隔肩之间。 方差消除肩部至少部分在电极固定台板的多个方差消除通道中的一个之内。 最小位置叠加等于最小通道尺寸减去最大肩部尺寸。 最大位置叠加等于最大通道尺寸减去最小肩部尺寸。 最大位置叠加大于最小位置叠加。

公开(公告)号：SG190060A1

公开(公告)日：2013-06-28

申请号：SG2013032925

申请日：2011-11-01

Applicant: LAM RES CORP

Inventor： LA CROIX CLIFF ,  AVOYAN ARMEN ,  OUTKA DUANE ,  ZHOU CATHERINE ,  SHIH HONG

Abstract: In one embodiment, an electrode polishing assembly may include an electrode securing platen, a plurality of electrode locating fasteners, and an electrode. Each of the electrode locating fasteners may include an electrode spacing shoulder, a variance cancelling shoulder extending from the electrode spacing shoulder, a threaded platen clamping portion extending from the variance cancelling shoulder, and a threaded nut that engages the threaded platen clamping portion. The electrode locating fasteners clamp the electrode securing platen between the threaded nut and the electrode spacing shoulder. The variance cancelling shoulder is at least partially within one of a plurality of variance cancelling passages of the electrode securing platen. A minimum position stack-up is equal to a minimum passage size minus a maximum shoulder size. A maximum position stack-up is equal to a maximum passage size minus a minimum shoulder size. The maximum position stack-up is greater than the minimum position stack-up.

公开(公告)号：SG11201402878WA

公开(公告)日：2014-07-30

申请号：SG11201402878W

申请日：2012-11-28

Applicant: LAM RES CORP

Inventor： AVOYAN ARMEN ,  LA CROIX CLIFF ,  SHIH HONG ,  RONNE ALLAN ,  DAUGHERTY JOHN ,  ZHOU CATHERINE

IPC: H01L21/205 ,  H01L21/302 ,  H01L21/3065