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公开(公告)号：SG11201402878WA
公开(公告)日：2014-07-30
申请号：SG11201402878W
申请日：2012-11-28
Applicant: LAM RES CORP
Inventor： AVOYAN ARMEN , LA CROIX CLIFF , SHIH HONG , RONNE ALLAN , DAUGHERTY JOHN , ZHOU CATHERINE
IPC: H01L21/205 , H01L21/302 , H01L21/3065
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