公开(公告)号：WO0203429A3

公开(公告)日：2002-10-17

申请号：PCT/US0120800

申请日：2001-06-29

Applicant: LAM RES CORP

Inventor： NGO TUAN ,  KAVEH FARRO ,  LAM CONNIE ,  HUANG CHUNG-HO ,  NI TUQIANG ,  LE ANTHONY T ,  SALKOW STEVEN

IPC: H01L21/3065 ,  G05B19/042 ,  H01J37/32 ,  H01L21/02 ,  G05B19/414 ,  H01L21/00

CPC classification number: H01J37/32431 ,  G05B19/0421 ,  G05B2219/2208 ,  G05B2219/25434 ,  G05B2219/45031 ,  H01J37/32 ,  H01J37/32935

Abstract: A central controller for use in a semiconductor manufacturing equipment integrates a plurality of controllers with an open architecture allowing real-time communication between the various control loops. The central controller includes at least one central processing unit (cpu) executing high level input output (i/o) and control algorithms and at least one integrated i/o controller providing integrated interface to sensors and control hardware. The integrated i/o controller performs basic i/o and low level control functions and communicates with the CPU through a bus to perform or enable controls of various subsystems of the semiconductor manufacturing equipment. A method for controlling a plurality of sensors and a plurality of control hardware for use in a semiconductor manufacturing equipment loads an application software onto a cpu board that is plugged in a bus. Sensors and control hardware are linked to electrical controllers that are mounted onto a single circuit board which occupies an address block in a memory space of the bus. The single circuit board is then plugged in the bus and the sensors and control hardware are controlled via the application software.

Abstract translation: 在半导体制造设备中使用的中央控制器将多个控制器集成在一起，该开放式架构允许各种控制回路之间的实时通信。 中央控制器包括至少一个执行高级输入输出（I / O）和控制算法的中央处理单元（cpu）以及至少一个提供与传感器和控制硬件的集成接口的集成I / O控制器。 集成的I / O控制器执行基本的I / O和低级控制功能，并通过总线与CPU通信，以执行或启用半导体制造设备各个子系统的控制。 用于控制在半导体制造设备中使用的多个传感器和多个控制硬件的方法将应用软件加载到插入总线的cpu板上。 传感器和控制硬件与电气控制器连接，电气控制器安装在单个电路板上，占用总线存储空间中的地址块。 然后将单电路板插入总线，并通过应用软件控制传感器和控制硬件。

公开(公告)号：WO2011003117A3

公开(公告)日：2011-04-28

申请号：PCT/US2010042933

申请日：2010-07-22

Applicant: LAM RES CORP ,  HUANG CHUNG HO ,  VENUGOPAL VIJAYAKUMAR C ,  LAM CONNIE ,  PODLESNIK DRAGAN

Inventor： HUANG CHUNG HO ,  VENUGOPAL VIJAYAKUMAR C ,  LAM CONNIE ,  PODLESNIK DRAGAN

IPC: H01L21/00

CPC classification number: G06F9/5027 ,  G05B19/4184 ,  G05B2219/31202 ,  G05B2219/31293 ,  G05B2219/31318 ,  G05B2219/31481 ,  G05B2219/32209 ,  G05B2219/45031 ,  G06F11/2035 ,  G06F11/2043 ,  Y02P90/14 ,  Y02P90/18

Abstract: A process-level troubleshooting architecture (PLTA) configured to facilitate substrate processing in a plasma processing system is provided. The architecture includes a process module controller. The architecture also includes a plurality of sensors, wherein each sensor of the plurality of sensors communicates with the process module controller to collect sensed data about one or more process parameters. The architecture further includes a process-module-level analysis server, wherein the process-module-level analysis server communicates directly with the plurality of sensors and the process module controller. The process-module-level analysis server is configured for receiving data, wherein the data include at least one of the sensed data from the plurality of sensors and process module and chamber data from the process module controller. The process-module-level analysis server is also configured for analyzing the data and sending interdiction data directly to the process module controller when a problem is identified during the substrate processing.

Abstract translation: 提供了配置为促进等离子体处理系统中的衬底处理的处理级故障排除体系结构（PLTA）。 该架构包括一个过程模块控制器。 该架构还包括多个传感器，其中多个传感器中的每个传感器与处理模块控制器通信以收集关于一个或多个处理参数的感测数据。 该体系结构还包括过程模块级分析服务器，其中过程模块级分析服务器直接与多个传感器和过程模块控制器通信。 处理模块级分析服务器被配置用于接收数据，其中该数据包括来自多个传感器和处理模块的感测数据和来自处理模块控制器的腔室数据中的至少一个。 过程模块级分析服务器还被配置用于在衬底处理期间识别问题时分析数据并将阻断数据直接发送到过程模块控制器。

公开(公告)号：AU7167601A

公开(公告)日：2002-01-14

申请号：AU7167601

申请日：2001-06-28

Applicant: LAM RES CORP

Inventor： NGO TUAN ,  KAVEH FARRO ,  LAM CONNIE ,  HUANG CHUNG-HO ,  NI TUQIANG ,  LE ANTHONY T ,  SALKOW STEVEN

IPC: H01L21/3065 ,  G05B19/042 ,  H01J37/32 ,  H01L21/02 ,  H01J37/00

Abstract: A central controller for use in a semiconductor manufacturing equipment integrates a plurality of controllers with an open architecture allowing real-time communication between the various control loops. The central controller includes at least one central processing unit (CPU) executing high level input output (i/o) and control algorithms and at least one integrated i/o controller providing integrated interface to sensors and control hardware. The integrated i/o controller performs basic i/o and low level control functions and communicates with the CPU through a bus to perform or enable controls of various subsystems of the semiconductor manufacturing equipment.

公开(公告)号：SG176563A1

公开(公告)日：2012-01-30

申请号：SG2011085073

申请日：2010-07-22

Applicant: LAM RES CORP

Inventor： HUANG CHUNG HO ,  VENUGOPAL VIJAYAKUMAR C ,  LAM CONNIE ,  PODLESNIK DRAGAN

Abstract: A process-level troubleshooting architecture (PLTA) configured to facilitate substrate processing in a plasma processing system is provided. The architecture includes a process module controller. The architecture also includes a plurality of sensors, wherein each sensor of the plurality of sensors communicates with the process module controller to collect sensed data about one or more process parameters. The architecture further includes a process-module-level analysis server, wherein the process-module-level analysis server communicates directly with the plurality of sensors and the process module controller. The process-module-level analysis server is configured for receiving data, wherein the data include at least one of the sensed data from the plurality of sensors and process module and chamber data from the process module controller. The process-module-level analysis server is also configured for analyzing the data and sending interdiction data directly to the process module controller when a problem is identified during the substrate processing.

公开(公告)号：SG10201403277XA

公开(公告)日：2014-10-30

申请号：SG10201403277X

申请日：2010-07-22

Applicant: LAM RES CORP

Inventor： HUANG CHUNG HO ,  VENUGOPAL VIJAYAKUMAR C ,  LAM CONNIE ,  PODLESNIK DRAGAN

Abstract: A process-level troubleshooting architecture (PLTA) configured to facilitate substrate processing in a plasma processing system is provided. The architecture includes a process module controller. The architecture also includes a plurality of sensors, wherein each sensor of the plurality of sensors communicates with the process module controller to collect sensed data about one or more process parameters. The architecture further includes a process-module-level analysis server, wherein the process-module-level analysis server communicates directly with the plurality of sensors and the process module controller. The process-module-level analysis server is configured for receiving data, wherein the data include at least one of the sensed data from the plurality of sensors and process module and chamber data from the process module controller. The process-module-level analysis server is also configured for analyzing the data and sending interdiction data directly to the process module controller when a problem is identified during the substrate processing.

公开(公告)号：DE60127257T2

公开(公告)日：2007-07-05

申请号：DE60127257

申请日：2001-06-29

Applicant: LAM RES CORP

Inventor： NGO TUAN ,  KAVEH FARRO ,  LAM CONNIE ,  HUANG CHUNG-HO ,  NI TUQIANG ,  LE ANTHONY T ,  SALKOW STEVEN

IPC: G05B19/414 ,  H01L21/3065 ,  G05B19/042 ,  H01J37/00 ,  H01J37/32 ,  H01L21/00 ,  H01L21/02

Abstract: A central controller for use in a semiconductor manufacturing equipment integrates a plurality of controllers with an open architecture allowing real-time communication between the various control loops. The central controller includes at least one central processing unit (CPU) executing high level input output (i/o) and control algorithms and at least one integrated i/o controller providing integrated interface to sensors and control hardware. The integrated i/o controller performs basic i/o and low level control functions and communicates with the CPU through a bus to perform or enable controls of various subsystems of the semiconductor manufacturing equipment.

公开(公告)号：DE60127257D1

公开(公告)日：2007-04-26

申请号：DE60127257

申请日：2001-06-29

Applicant: LAM RES CORP

Inventor： NGO TUAN ,  KAVEH FARRO ,  LAM CONNIE ,  HUANG CHUNG-HO ,  NI TUQIANG ,  LE ANTHONY T ,  SALKOW STEVEN

IPC: G05B19/414 ,  H01L21/3065 ,  G05B19/042 ,  H01J37/00 ,  H01J37/32 ,  H01L21/00 ,  H01L21/02

Abstract: A central controller for use in a semiconductor manufacturing equipment integrates a plurality of controllers with an open architecture allowing real-time communication between the various control loops. The central controller includes at least one central processing unit (CPU) executing high level input output (i/o) and control algorithms and at least one integrated i/o controller providing integrated interface to sensors and control hardware. The integrated i/o controller performs basic i/o and low level control functions and communicates with the CPU through a bus to perform or enable controls of various subsystems of the semiconductor manufacturing equipment.

公开(公告)号：AT357011T

公开(公告)日：2007-04-15

申请号：AT01950693

申请日：2001-06-29

Applicant: LAM RES CORP

Inventor： NGO TUAN ,  KAVEH FARRO ,  LAM CONNIE ,  HUANG CHUNG-HO ,  NI TUQIANG ,  LE ANTHONY T ,  SALKOW STEVEN

IPC: H01L21/3065 ,  G05B19/042 ,  H01J37/32 ,  H01L21/02 ,  G05B19/414 ,  H01J37/00 ,  H01L21/00

Abstract: A central controller for use in a semiconductor manufacturing equipment integrates a plurality of controllers with an open architecture allowing real-time communication between the various control loops. The central controller includes at least one central processing unit (CPU) executing high level input output (i/o) and control algorithms and at least one integrated i/o controller providing integrated interface to sensors and control hardware. The integrated i/o controller performs basic i/o and low level control functions and communicates with the CPU through a bus to perform or enable controls of various subsystems of the semiconductor manufacturing equipment.

公开(公告)号：AU7166101A

公开(公告)日：2002-01-14

申请号：AU7166101

申请日：2001-06-29

Applicant: LAM RES CORP

Inventor： NGO TUAN ,  KAVEH FARRO ,  LAM CONNIE ,  HUANG CHUNG-HO ,  NI TUQIANG ,  LE ANTHONY T ,  SALKOW STEVEN

IPC: H01L21/3065 ,  G05B19/042 ,  H01J37/32 ,  H01L21/02 ,  H01L21/00

Abstract: A central controller for use in a semiconductor manufacturing equipment integrates a plurality of controllers with an open architecture allowing real-time communication between the various control loops. The central controller includes at least one central processing unit (CPU) executing high level input output (i/o) and control algorithms and at least one integrated i/o controller providing integrated interface to sensors and control hardware. The integrated i/o controller performs basic i/o and low level control functions and communicates with the CPU through a bus to perform or enable controls of various subsystems of the semiconductor manufacturing equipment.