公开(公告)号：WO2005006002A3

公开(公告)日：2005-02-10

申请号：PCT/EP2004051008

申请日：2004-06-03

Applicant: LEICA MICROSYSTEMS ,  SOENKSEN DIRK ,  FRIEDRICH RALF ,  DRAEGER ANDREAS ,  SCHUPP DETLEF ,  VAN LUU THIN ,  LANGER WOLFGANG

Inventor： SOENKSEN DIRK ,  FRIEDRICH RALF ,  DRAEGER ANDREAS ,  SCHUPP DETLEF ,  VAN LUU THIN ,  LANGER WOLFGANG

IPC: G01N21/95 ,  G06T7/00 ,  G01N21/88

CPC classification number: G01N21/9501 ,  G01N2021/8854 ,  G06T7/0004 ,  G06T2207/30148

Abstract: The invention relates to a method of learning a knowledge-based database used in automatic defect classification. According to said method, the user is spared a series of entries as the system carries out an automatic learn mode, which requires a reduced number of user entries.

Abstract translation: 它是公开教导一种用于自动缺陷分类知识数据库的方法。 用户将被截取的数目的输入，这是因为系统执行自动学习模式下，用户输入的数目减少

公开(公告)号：DE10239548A1

公开(公告)日：2004-03-04

申请号：DE10239548

申请日：2002-08-23

Applicant: LEICA MICROSYSTEMS

Inventor： CEMIC FRANZ ,  DANNER LAMBERT ,  GRAF UWE ,  MAINBERGER ROBERT ,  SOENKSEN DIRK ,  KNORZ VOLKER

IPC: G01B11/30 ,  G01N21/88 ,  G01N21/95 ,  G01N21/956 ,  G02B21/06 ,  G02B21/10 ,  G02B21/12 ,  H01L21/66

Abstract: A device and method for inspecting an object ( 2 ) uses a bright field illumination beam path ( 4 ) of a bright field light source ( 5 ), said beam path being formed so that it passes through the projection optics ( 3 ), and a dark field illumination beam path ( 6 ) of a dark field light source ( 7 ), this beam path being formed so that it also passes through the projection optics ( 3 ). The object ( 2 ) can be projected by the projection optics ( 3 ) onto the least one detector ( 8 ), and the object ( 2 ) is simultaneously illuminated by both light sources ( 5, 7 ). In order to simultaneously detect bright field images and dark field images without involving complicated filtering operations, the light used for the dark field illumination is pulsed and the pulse intensity of the light used for the dark field illumination is greater by at least one order of magnitude than the intensity of the continuous light, which is used for the bright field illumination, during a pulsed interval.

公开(公告)号：DE10232242A1

公开(公告)日：2004-02-05

申请号：DE10232242

申请日：2002-07-17

Applicant: LEICA MICROSYSTEMS

Inventor： SOENKSEN DIRK ,  MAINBERGER ROBERT ,  SCHMIDT GUENTER

IPC: G02B21/00 ,  G02B21/26 ,  G02B21/36

Abstract: A process for scanning a probe (1) on a scanning table (2) using an optical imaging system with a camera or optical measuring device (7) comprises calibrating and storing the scanning table height data, scanning the probe and determining the probe height data with respect to the table data. An Independent claim is also included for a device to carry out the above process.

公开(公告)号：DE102004022717B4

公开(公告)日：2006-09-21

申请号：DE102004022717

申请日：2004-05-07

Applicant: LEICA MICROSYSTEMS

Inventor： SOENKSEN DIRK ,  FRIEDRICH RALF ,  DRAEGER ANDREAS ,  SCHUPP DETLEF ,  LUU THIN VAN ,  LANGER WOLFGANG

IPC: G06N5/00 ,  G01N21/95

公开(公告)号：DE102004022717A1

公开(公告)日：2005-02-10

申请号：DE102004022717

申请日：2004-05-07

Applicant: LEICA MICROSYSTEMS

Inventor： SOENKSEN DIRK ,  FRIEDRICH RALF ,  DRAEGER ANDREAS ,  SCHUPP DETLEF ,  LUU THIN VAN ,  LANGER WOLFGANG

IPC: G01N21/95 ,  G06N5/00

Abstract: Method for experience-based teaching of a knowledge base used in automatic defect classification, wherein a system enters an automatic learn mode so that an operator does not have to make multiple entries. The method involves selection of a review data file, selection of parameters by an operator for a learn mode operation, starting of an alignment and automatic setting of optical lighting intensity. Testing of defect detection is then undertaken using a number of sample images.