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公开(公告)号：JP2004191375A
公开(公告)日：2004-07-08
申请号：JP2003405857
申请日：2003-12-04
Inventor： CEMIC FRANZ , BLAESING-BANGERT CAROLA
CPC classification number: G06T7/001 , G06T7/74 , G06T2207/30148
Abstract: PROBLEM TO BE SOLVED: To provide a microscope minimizing an error of the interpretation of measured values.
SOLUTION: A subject 2 is illuminated with a light source 3, imaged by an imaging system 4, preferably detector 5 embodied in a CCD (charge-coupled device) camera, the detected image of the subject 2 is compared with a reference image so as to minimize the error of interpretation of the measured value. Information about characteristics of the imaging system 4 is taken into consideration at the time of a generation of the reference image, a difference capable of being demarcated from the compared image is modified so as to be conformed with the reference image and the detected image in at least most part of them.
COPYRIGHT: (C)2004,JPO&NCIPI-
公开(公告)号：JP2003232989A
公开(公告)日：2003-08-22
申请号：JP2003025554
申请日：2003-02-03
Applicant: LEICA MICROSYSTEMS
Inventor： CEMIC FRANZ , DANNER LAMBERT , MAINBERGER ROBERT , VEITH MICHAEL , OSTERFELD MARTIN , GRAF UWE
Abstract: PROBLEM TO BE SOLVED: To constitute an automatic focusing module in such a manner that sharpness adjustment to an object to be examined can be surely made without depending upon an edge effect. SOLUTION: The module is provided with at least two light sources and each of the two light sources forms a light beam for focusing. The light sources are respectively provided with optical means for guiding portions of the respective light beams to input coupling means. The input coupling means input and couple the respective light beams to an illumination light beam of the system of the microscopic base and are provided with at least first and second detectors toward the object in such a manner that the light beams from the first and second light sources respectively reflected from the surface of the object are made incident on the first and second detectors through the optical means. COPYRIGHT: (C)2003,JPO
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公开(公告)号：JP2004117365A
公开(公告)日：2004-04-15
申请号：JP2003338380
申请日：2003-09-29
Inventor： CEMIC FRANZ , DANNER LAMBERT
CPC classification number: G01B11/00
Abstract: PROBLEM TO BE SOLVED: To conduct critical microscopic dimension measurement reproducibly and to eliminate the influence of a measuring point and orientation of a characteristic part.
SOLUTION: The microscopic dimension measuring apparatus (1) comprises a light source (2), a beam forming optical system (3), and a condenser (11). Between the beam forming optical system (3) and the condenser (11), first, a first microlens array (5) is placed which comprises each microlens (I, II, III) producing a divergent light flux so that a pupil (9) of the condenser is filled. Behind the microlens array (5), a first auxiliary optical element (6) is placed which has positive refracting power so that the pupil (9) of the condenser is placed on a focal plane. Behind the first auxiliary optical element (6), a second auxiliary optical element (16) having positive refracting power is placed. Behind the second auxiliary optical element (16), a second microlens array (17) is placed. Illumination based on the Kohler's principle is produced, and highly homogeneous field illumination appears which has rotationally symmetric intensity distribution with respect to the pupil (9) of the condenser simultaneously.
COPYRIGHT: (C)2004,JPO-
公开(公告)号：JP2002139673A
公开(公告)日：2002-05-17
申请号：JP2001198939
申请日：2001-06-29
Applicant: LEICA MICROSYSTEMS WETZLER GMB
Inventor： CEMIC FRANZ , DANNER LAMBERT , HOPPEN GERHARD
IPC: G01B11/00 , G01B11/03 , G02B6/00 , G02B6/42 , G02B19/00 , G02B27/00 , G02B27/09 , G03F7/20 , H01L21/027
Abstract: PROBLEM TO BE SOLVED: To provide an illuminator which uniformly irradiates an image field extremely wider than heretofore, has little light loss and is extremely small in the light difference within the irradiated image field and a coordinate measuring instrument having this illuminator. SOLUTION: An optical fiber bundle (4) is arranged as an optical waveguide. A uniformizing optical system (6), which uniformizes the nonuniform intensity distribution of the light emitted from the optical fiber bundle (4) in the image field, is arranged between a coupling-out optical system (5) and an illumination optical system (17; 20).
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公开(公告)号：AU2003253422A1
公开(公告)日：2004-03-11
申请号：AU2003253422
申请日：2003-08-21
Applicant: LEICA MICROSYSTEMS
Inventor： DANNER LAMBERT , GRAF UWE , MAINBERGER ROBERT , SONKSEN DIRK , KNORZ VOLKER , CEMIC FRANZ
Abstract: A device and method for inspecting an object ( 2 ) uses a bright field illumination beam path ( 4 ) of a bright field light source ( 5 ), said beam path being formed so that it passes through the projection optics ( 3 ), and a dark field illumination beam path ( 6 ) of a dark field light source ( 7 ), this beam path being formed so that it also passes through the projection optics ( 3 ). The object ( 2 ) can be projected by the projection optics ( 3 ) onto the least one detector ( 8 ), and the object ( 2 ) is simultaneously illuminated by both light sources ( 5, 7 ). In order to simultaneously detect bright field images and dark field images without involving complicated filtering operations, the light used for the dark field illumination is pulsed and the pulse intensity of the light used for the dark field illumination is greater by at least one order of magnitude than the intensity of the continuous light, which is used for the bright field illumination, during a pulsed interval.
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Patent Agency Ranking
公开(公告)号：DE10245473A1
公开(公告)日：2004-04-08
申请号：DE10245473
申请日：2002-09-28
Applicant: LEICA MICROSYSTEMS
Inventor： CEMIC FRANZ , DANNER LAMBERT
Abstract: Critical dimension measurement instrument (1) has a light source (2), radiation shaping optics (3) and a condenser (11). Between shaping optics and condenser is micro-lens array (5), with each lens generating a divergent beam bundle that fills the condenser pupil. Following the array is an optical auxiliary element with positive refractive coefficient with its focal plane coinciding with the condenser pupil. A second auxiliary optical element of positive refractive coefficient and a second micro-lens array are then position in the beam path prior to the condenser.
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公开(公告)号：DE10204367A1
公开(公告)日：2003-09-18
申请号：DE10204367
申请日：2002-02-02
Applicant: LEICA MICROSYSTEMS
Inventor： CEMIC FRANZ , DANNER LAMBERT , MAINBERGER ROBERT , VEITH MICHAEL , OSTERFELD MARTIN , GRAF UWE
Abstract: Autofocus module for a microscope system (2) comprises: at least two light sources (20, 21) each of which generates a light beam (22) for focussing; optical deflector or prism (27, 32) for deflection of a part of each beam into an beam that is used to illuminate an object; and at least first and second detectors (35, 45) for detecting light originating from respective light sources reflected from the object. Independent claims are included for: (1) a corresponding microscope system; (2) autofocus method. According to the method the optimal focal position is determined using the measured intensities on the first and second detectors.
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公开(公告)号：DE10204367B4
公开(公告)日：2006-05-11
申请号：DE10204367
申请日：2002-02-02
Applicant: LEICA MICROSYSTEMS
Inventor： CEMIC FRANZ , DANNER LAMBERT , MAINBERGER ROBERT , VEITH MICHAEL , OSTERFELD MARTIN , GRAF UWE
Abstract: Autofocus module for a microscope system (2) comprises: at least two light sources (20, 21) each of which generates a light beam (22) for focussing; optical deflector or prism (27, 32) for deflection of a part of each beam into an beam that is used to illuminate an object; and at least first and second detectors (35, 45) for detecting light originating from respective light sources reflected from the object. Independent claims are included for: (1) a corresponding microscope system; (2) autofocus method. According to the method the optimal focal position is determined using the measured intensities on the first and second detectors.
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公开(公告)号：DE10257323A1
公开(公告)日：2004-07-08
申请号：DE10257323
申请日：2002-12-06
Applicant: LEICA MICROSYSTEMS
Inventor： CEMIC FRANZ , BLAESING-BANGERT CAROLA
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公开(公告)号：DE10239548A1
公开(公告)日：2004-03-04
申请号：DE10239548
申请日：2002-08-23
Applicant: LEICA MICROSYSTEMS
Inventor： CEMIC FRANZ , DANNER LAMBERT , GRAF UWE , MAINBERGER ROBERT , SOENKSEN DIRK , KNORZ VOLKER
Abstract: A device and method for inspecting an object ( 2 ) uses a bright field illumination beam path ( 4 ) of a bright field light source ( 5 ), said beam path being formed so that it passes through the projection optics ( 3 ), and a dark field illumination beam path ( 6 ) of a dark field light source ( 7 ), this beam path being formed so that it also passes through the projection optics ( 3 ). The object ( 2 ) can be projected by the projection optics ( 3 ) onto the least one detector ( 8 ), and the object ( 2 ) is simultaneously illuminated by both light sources ( 5, 7 ). In order to simultaneously detect bright field images and dark field images without involving complicated filtering operations, the light used for the dark field illumination is pulsed and the pulse intensity of the light used for the dark field illumination is greater by at least one order of magnitude than the intensity of the continuous light, which is used for the bright field illumination, during a pulsed interval.
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