MEMS DEVICE
    1.
    发明申请
    MEMS DEVICE 有权
    MEMS器件

    公开(公告)号:US20150288268A1

    公开(公告)日:2015-10-08

    申请号:US14438315

    申请日:2012-10-25

    Applicant: LEMOPTIX SA

    CPC classification number: H02K33/18 G02B26/0833 H02K1/17 H02K1/34

    Abstract: According to the present invention there is provided a device comprising a MEMS die and, a single magnet, wherein the MEMS die cooperates with the magnet, such that the MEMS die is submerged in a magnetic field provided by the magnet; wherein the magnet is a single multi-pole magnet

    Abstract translation: 根据本发明,提供了一种包括MEMS管芯和单个磁体的器件,其中MEMS管芯与磁体配合,使得MEMS管芯浸没在由磁体提供的磁场中; 其中所述磁体是单个多极磁体

    ACTUATOR
    2.
    发明申请
    ACTUATOR 有权
    执行机构

    公开(公告)号:US20140354085A1

    公开(公告)日:2014-12-04

    申请号:US14353746

    申请日:2012-09-25

    Applicant: Lemoptix SA

    Abstract: According to the present invention there is provided an actuator comprising, a movable member, the movable member comprising a support frame which is configured such that it can oscillate about a first oscillation axis and a mirror which is fixed to the support frame such that oscillation of the support frame will effect oscillation of the mirror; an coil, which cooperates with the support frame; one or more boundary portions provided between the support frame and the mirror which reduce the influence of warp transmitted from an edge of the support frame to the mirror, as the support frame oscillates about the first oscillation axis; wherein the support frame further comprises one or more cut-out regions, wherein the one or more cut-out regions are configured to be parallel to at least a portion of the coil, to reduce stress on the coil as the support frame oscillates about the first oscillation axis and/or to reduce the temperature dependence of the properties of the actuator.

    Abstract translation: 根据本发明,提供了一种致动器,其包括可动构件,所述可动构件包括支撑框架,所述支撑框架被构造成使得其可围绕第一摆动轴线摆动并且反射镜被固定到所述支撑框架, 支撑框架将影响镜子的振荡; 线圈,其与支撑框架配合; 一个或多个边界部分设置在所述支撑框架和所述反射镜之间,当所述支撑框架围绕所述第一振荡轴线摆动时,所述边界部分减小从所述支撑框架的边缘传递到所述反射镜的翘曲的影响; 其中所述支撑框架还包括一个或多个切除区域,其中所述一个或多个切除区域被配置为平行于所述线圈的至少一部分,以在所述支撑框架绕所述线圈摆动时减小所述线圈上的应力 第一振荡轴和/或降低致动器的性质的温度依赖性。

    MEMS DEVICE
    3.
    发明申请
    MEMS DEVICE 有权
    MEMS器件

    公开(公告)号:US20150168714A1

    公开(公告)日:2015-06-18

    申请号:US14406498

    申请日:2012-06-13

    Applicant: Lemoptix SA

    Abstract: According to the present invention there is provided a MEMS device comprising, a mirror which is connected to a fixed portion by means of a first and second torsional arm, each of the first and second torsional arms are configured such that they can twist about torsional axes so as to oscillate the mirror about a first oscillation axes, and wherein the first and second torsional arms are each configured to have two or more meanders and wherein the first and second torsional arms are arranged symmetrically relative to the first oscillation axis.

    Abstract translation: 根据本发明,提供了一种MEMS装置,其包括:通过第一和第二扭转臂连接到固定部分的反射镜,第一和第二扭转臂中的每一个被构造成使得它们可绕扭转轴线 以使所述反射镜围绕第一振荡轴线振荡,并且其中所述第一和第二扭转臂各自构造成具有两个或多个曲折,并且其中所述第一和第二扭转臂相对于所述第一振荡轴对称地布置。

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