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    A MEMS DEVICE
    2.
    发明申请
    A MEMS DEVICE 审中-公开
    MEMS器件

    公开(公告)号：WO2014094850A1

    公开(公告)日：2014-06-26

    申请号：PCT/EP2012/076259

    申请日：2012-12-20

    Applicant: LEMOPTIX SA

    Inventor： GAMET, Julien ,  KHECHANA, Faouzi

    IPC: G02B26/08

    CPC classification number: G02B26/101 ,  G02B7/008 ,  G02B26/085

    Abstract: A MEMS micro-mirror device comprising, a MEMS micro-mirror, a support structure and, a first and second torsional arm which each connect the MEMS micro-mirror to the support structure, wherein the first and second torsional arms are arranged to define a first oscillation axis about which the MEMS micro-mirror can oscillate; a single actuation coil for oscillating the MEMS micro mirror about the first oscillation axis, at least a portion of the single actuation coil being arranged to cooperate with the MEMS micro mirror; a magnet which is arranged such that a magnetic field generated by the magnet submerges at least the portion of the single actuation coil which cooperates with the MEMS micro mirror; wherein the single actuation coil is configured to extend along the first and second torsional arms.

    Abstract translation: 一种MEMS微镜装置，包括MEMS微镜，支撑结构以及第一和第二扭转臂，每个将所述MEMS微反射镜连接到所述支撑结构，其中所述第一和第二扭转臂被布置成限定 第一振荡轴，MEMS微镜可绕其摆动; 用于围绕第一振荡轴线振荡MEMS微镜的单个致动线圈，单个致动线圈的至少一部分被布置成与MEMS微反射镜协作; 所述磁体被布置成使得由所述磁体产生的磁场至少淹没所述单个致动线圈的与所述MEMS微反射镜协作的部分; 其中所述单个致动线圈被构造成沿着所述第一和第二扭转臂延伸。

    MICRO-PROJECTION DEVICE WITH ANTI-SPECKLE IMAGING MODE
    3.
    发明申请
    MICRO-PROJECTION DEVICE WITH ANTI-SPECKLE IMAGING MODE 审中-公开
    具有防伪成像模式的微型投影设备

    公开(公告)号：WO2011134515A1

    公开(公告)日：2011-11-03

    申请号：PCT/EP2010/055763

    申请日：2010-04-28

    Applicant: LEMOPTIX SA ,  KILCHER, Lucio ,  KHECHANA, Faouzi ,  ABELÉ, Nicolas

    Inventor： KILCHER, Lucio ,  KHECHANA, Faouzi ,  ABELÉ, Nicolas

    IPC: H04N9/31 ,  G02B27/48

    CPC classification number: G02B27/48 ,  G02B26/0833 ,  G02B26/101 ,  G03B21/16 ,  H04N9/3129

    Abstract: A micro-projection system for projecting light on a projection surface (104), comprising: -at least one coherent light source (101); -optical elements (102, 108, 109) in the optical path between said coherent light source and said projection surface; -said optical elements including at least one reflective member (102) actuated by a drive signal for deviating light from said light source so as to scan a projected image onto said projecting surface; -said optical elements including at least one pixel displacement unit (106) for providing a displacement signal synchronized with the image scanning signal so as to reduce speckle onto said projecting surface. The corresponding method for reducing speckle is also provided.

    Abstract translation: 一种用于在投影表面（104）上投射光的微投影系统，包括： - 至少一个相干光源（101）; - 所述相干光源和所述投影表面之间的光路中的光学元件（102,108,109）; 所述光学元件包括由驱动信号驱动的至少一个反射构件（102），用于偏离来自所述光源的光，以将投影图像扫描到所述突出表面上; 包括至少一个像素位移单元（106）的光学元件，用于提供与图像扫描信号同步的位移信号，以便减少所述突出表面上的斑点。 还提供了减少斑点的相应方法。

    OPTICAL MEMS SCANNING MICRO-MIRROR WITH ANTI-SPECKLE COVER
    4.
    发明申请
    OPTICAL MEMS SCANNING MICRO-MIRROR WITH ANTI-SPECKLE COVER 审中-公开
    光学MEMS扫描微镜与防伪盖

    公开(公告)号：WO2011134516A1

    公开(公告)日：2011-11-03

    申请号：PCT/EP2010/055764

    申请日：2010-04-28

    Applicant: LEMOPTIX SA ,  ABELÉ, Nicolas ,  KHECHANA, Faouzi ,  KILCHER, Lucio

    Inventor： ABELÉ, Nicolas ,  KHECHANA, Faouzi ,  KILCHER, Lucio

    IPC: G02B27/48

    CPC classification number: G02B27/48 ,  B81C1/00 ,  G02B5/0215 ,  G02B5/0278 ,  G02B26/0833 ,  G02B26/0875 ,  G02B26/105 ,  G03B21/28 ,  H04N9/3129 ,  Y10T29/42

    Abstract: Optical MEMS scanning micro-mirror comprising: -a movable scanning micro-mirror (101), being pivotally connected to a MEMS body (102) substantially surrounding the lateral sides of the micro-mirror, -a transparent window (202) substantially covering the reflection side of the micro-mirror; -wherein a piezo-actuator assembly (500) and a layer of deformable transparent material (501) are provided on the outer portion of said window (202); -the piezo-actuator assembly (500) being arranged at the periphery of the layer of transparent material (501); -said piezo-actuator assembly (500) and transparent material (501) cooperating so that when actuated, the piezo-actuator assembly (500) causes micro-deformation of the transparent material (501), thereby providing an anti-speckle effect. The invention also provides the corresponding micro-projection system and method for reducing speckle.

    Abstract translation: 光学MEMS扫描微镜包括： - 可移动扫描微镜（101），其可枢转地连接到基本上围绕微镜的侧面的MEMS主体（102）， - 透明窗（202），基本上覆盖 反射镜的微镜; - 在所述窗口（202）的外部设置有压电致动器组件（500）和可变形透明材料层（501）; - 所述压电致动器组件（500）布置在所述透明材料层（501）的周边处; 压电致动器组件（500）和透明材料（501）配合使得当致动时，压电致动器组件（500）引起透明材料（501）的微变形，从而提供抗散斑效果。 本发明还提供了相应的微投影系统和减少斑点的方法。

    MICROMIROIR A ACTIONNEMENT ELECTROMAGNETIQUE
    5.
    发明申请
    MICROMIROIR A ACTIONNEMENT ELECTROMAGNETIQUE 审中-公开
    电磁致动器

    公开(公告)号：WO2009147304A1

    公开(公告)日：2009-12-10

    申请号：PCT/FR2008/050970

    申请日：2008-06-02

    Applicant: LEMOPTIX SA ,  ABELE, Nicolas ,  KHECHANA, Faouzi

    Inventor： ABELE, Nicolas ,  KHECHANA, Faouzi

    IPC: G02B26/08

    CPC classification number: G02B26/085 ,  B81B3/0021 ,  B81B2201/038 ,  B81B2201/042

    Abstract: L'invention concerne un micromiroir comportant une plaquette réfléchissante (21) mobile en rotation autour d'un axe (32) et fixée à un cadre (23) par deux bras parallèles (27, 29) alignés de part et d'autre de la plaquette de façon à former l'axe, l'ensemble du cadre et de la plaquette étant fixé sur un support, le micromiroir comportant au moins une couche aimantée (39, 40).

    Abstract translation: 本发明涉及一种微反射镜，其包括反射板（21），该反射板可旋转地围绕轴线（32）移动并且通过两个对准在所述板的两侧的平行臂（27,29）附接到框架（23）以形成轴线， 所述框架和所述板的组件附接到基板，所述微反射镜包括至少一个磁化层（39,40）。

    AN ACTUATOR
    6.
    发明公开
    AN ACTUATOR 审中-公开
    执行器

    公开(公告)号：EP2771732A1

    公开(公告)日：2014-09-03

    申请号：EP12775177.4

    申请日：2012-09-25

    Applicant: Lemoptix SA

    Inventor： GAMET, Julien ,  KHECHANA, Faouzi

    IPC: G02B26/08 ,  B81B3/00

    CPC classification number: H02K33/00 ,  B81B3/0072 ,  B81B2201/038 ,  B81B2201/042 ,  B81B2203/058 ,  G02B26/08 ,  G02B26/085 ,  H02K9/22 ,  H02K33/02 ,  H02K33/16

    Abstract: According to the present invention there is provided an actuator comprising, a movable member, the movable member comprising a support frame which is configured such that it can oscillate about a first oscillation axis and a mirror which is fixed to the support frame such that oscillation of the support frame will effect oscillation of the mirror; an coil, which cooperates with the support frame; one or more boundary portions provided between the support frame and the mirror which reduce the influence of warp transmitted from an edge of the support frame to the mirror, as the support frame oscillates about the first oscillation axis; wherein the support frame further comprises one or more cut-out regions, wherein the one or more cut-out regions are configured to be parallel to at least a portion of the coil, to reduce stress on the coil as the support frame oscillates about the first oscillation axis and/or to reduce the temperature dependence of the properties of the actuator.

    Abstract translation: 根据本发明，提供了一种致动器，包括：一个可移动部件，该可移动部件包括一个支撑框架，该支撑框架构造成可以围绕第一摆动轴线摆动;以及镜子，固定在支撑框架上， 支架会影响反光镜的摆动; 与支撑框架配合的线圈; 当所述支撑框围绕所述第一摆动轴线摆动时，在所述支撑框架和所述镜子之间设置一个或多个边界部分，所述边界部分减少从所述支撑框架的边缘传输到所述镜子的翘曲的影响; 其中所述支撑框架还包括一个或多个切除区域，其中所述一个或多个切除区域被配置为平行于所述线圈的至少一部分，以在所述支撑框架围绕所述线圈振荡时减小所述线圈上的压力 第一摆动轴线和/或降低致动器的特性的温度依赖性。

    OPTICAL MICRO-PROJECTION SYSTEM AND PROJECTION METHOD
    7.
    发明公开
    OPTICAL MICRO-PROJECTION SYSTEM AND PROJECTION METHOD 审中-公开
    OPTISCHES MIKROPROJEKTIONSSYSTEM UND PROJEKTIONSVERFAHREN

    公开(公告)号：EP2460357A1

    公开(公告)日：2012-06-06

    申请号：EP09781345.5

    申请日：2009-07-31

    Applicant: Lemoptix SA

    Inventor： KILCHER, Lucio ,  KHECHANA, Faouzi

    IPC: H04N9/31

    CPC classification number: H04N9/3194 ,  G01S7/4814 ,  G01S17/102 ,  G01S17/42 ,  G02B26/0833 ,  G06F3/017 ,  G06F3/0304 ,  H04N9/3129 ,  H04N9/3155 ,  H04N9/3185 ,  H04N9/3188

    Abstract: An optical micro-projection system comprising the following components: at least one laser light source (200, 400, 402, 600); at least one movable mirror (102, 103, 203) for deviating light from said light source to allow generation of images on a projection surface (104, 301, 303, 306, 603); a self mixing module for measurement of the distance (604) between the projection source and a projection surface, said self mixing module comprising: —at least one photodiode (401, 601) for monitoring the light emission power of the laser light source; —an optical power variation counter for counting optical power variations (605); successive displacements of said mirror allowing the self mixing module providing successive projection distance measurements of a plurality of points of said projection surface. A projection method for optical micro-projection system and a distance measurement method are also provided.

    Abstract translation: 一种光学微投影系统，包括以下部件：至少一个激光光源（200,400,402,600）; 至少一个可移动镜（102,103,203），用于偏离所述光源的光以允许在投影表面（104,301,303,306,603）上产生图像; 用于测量投影源和投影表面之间的距离（604）的自混合模块，所述自混合模块包括： - 用于监测激光光源的发光功率的至少一个光电二极管（401,601）; - 用于计数光功率变化的光功率变化计数器（605）; 所述镜的连续位移允许自混合模块提供所述投影表面的多个点的连续的投射距离测量。 还提供了一种用于光学微投影系统的投影方法和距离测量方法。

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