公开(公告)号：KR20070112989A

公开(公告)日：2007-11-28

申请号：KR20060046634

申请日：2006-05-24

Applicant: LG PHILIPS LCD CO LTD

Inventor： OH JAE YOUNG ,  JEE YOUNG SEUNG ,  KIM JEONG OH ,  KIM SOO POOL

IPC: G02F1/136

CPC classification number: G02F1/136286 ,  G02F1/1335 ,  G02F2001/136231 ,  H01L29/786

Abstract: An LCD and a manufacturing method thereof are provided to form PR patterns with different heights by using an exposure device including a DMD(Digital Micro mirror Device) chip, thereby reducing the number of masks by not using a diffraction photo mask or a semitransparent mask and accordingly, manufacturing a TFT(Thin Film Transistor) substrate without using the exposure device with the DMD in all manufacturing processes. A method for manufacturing an LCD(Liquid Crystal Display) comprises the following steps of: providing an exposure device(100) where a light source and plural minute mirrors are arranged, wherein the plural minute mirrors are separately and electrically controlled to reflect light from the light source toward a position of a target selectively; forming at least one thin film(221,223) on a substrate(201) for the LCD; forming PR(PhotoResist) on the thin film; arranging the substrate on the position of the target; and driving the light source, controlling each of the minute mirrors of the exposure device, radiating light to the first position of the PR with first light intensity, and radiating light to the second position of the PR with second light intensity; developing the PR and remaining PR patterns(225a,225b) with different heights on the thin film; and patterning the thin film by using the PR patterns as a mask.

Abstract translation: 提供LCD及其制造方法，通过使用包括DMD（数字微镜装置）芯片的曝光装置形成具有不同高度的PR图案，从而通过不使用衍射光掩模或半透明掩模来减少掩模的数量， 因此，在所有制造工艺中不使用具有DMD的曝光装置制造TFT（薄膜晶体管）基板。 一种用于制造LCD（液晶显示器）的方法包括以下步骤：提供设置有光源和多个分钟镜的曝光装置（100），其中多个分钟反射镜被分开并电控制以反射来自 选择性地朝向目标位置的光源; 在用于所述LCD的基板（201）上形成至少一个薄膜（221,223）; 在薄膜上形成PR（PhotoResist）; 将基板布置在目标的位置上; 并驱动光源，控制曝光装置的每个微反射镜，以第一光强度将光照射到PR的第一位置，并以第二光强度将光照射到PR的第二位置; 在薄膜上开发不同高度的PR和剩余PR图案（225a，225b）; 并通过使用PR图案作为掩模对薄膜进行图案化。