MICRO ELECTROMECHANICAL SYSTEM OPTICAL DEVICE

    公开(公告)号:JP2001221962A

    公开(公告)日:2001-08-17

    申请号:JP2000309805

    申请日:2000-10-10

    Abstract: PROBLEM TO BE SOLVED: To provide a micro electromechanical system optical device having a reduced occupied area. SOLUTION: In order to increases the production quantity on a substrate, the micro electromechanical system (MEM) optical device has the reduced occupied area. The MEM device has the optical element which has an outer edge and is supported by a supporting structure body disposed at the substrate. The supporting structure body is mechanically connected to the substrate by the pair of first and second beam which moves the structure to the startup position at which the optical element is raised upward of the substrate. At the raised position, the optical element is selectively inclined in order to deflect an optical signal. The beam is connected at one end to the supporting structure body, and is connected at the other end to the substrate, and the edge of the first and the second beam is placed so that they may be approached and located in the outer edge of the optical element. In order to decrease the contact area between the edge of the optical element and the substrate, it is suitable that a static frictional force reduction element is located in the outer edge of the optical element.

    DOUBLE MICROELECTRONIC MACHINE ACTUATOR DEVICE

    公开(公告)号:JP2001179699A

    公开(公告)日:2001-07-03

    申请号:JP2000315660

    申请日:2000-10-16

    Abstract: PROBLEM TO BE SOLVED: To provide a microelectronic machine actuator device capable of double operation. SOLUTION: This device comprises a first substrate 12, a first operation electrode 20 formed on the first substrate 12, a second substrate 52 formed spacially from the first substrate, a second operation electrode 54 formed in a position on the second substrate spaced from the first operation electrode, and a micromachine 14 arranged between the first operation electrode 20 and the second operation electrode 54. It is featured by that the first electrode applies electrostatic attraction to the micromachine in accordance with a voltage selectively applied to the first operation electrode for moving the micromachine to a first position in a direction of the first substrate, and the second operation electrode applies electrostatic attraction to the micromachine in accordance with a voltage selectively applied to the second operation electrode for moving the micromachine to a second position in a direction of the second substrate.

    6.
    发明专利
    未知

    公开(公告)号:DE602005000611D1

    公开(公告)日:2007-04-12

    申请号:DE602005000611

    申请日:2005-03-23

    Abstract: A highly reliable fuse for explosives and armaments is achieved by employing a micro mechanical device that operates to disrupt a relatively low impedance bypass circuit coupled in parallel with a relatively high impedance trigger mechanism (101). The removal of the electrical bypassing is performed as a result of the movement of the micro mechanical device to enable detonation under prescribed conditions. The electrical bypassing is removed by having at least one low impedance electrical bridge (105) that is part of the bypass circuit break when the micro mechanical device (103,105) is subjected to prescribed trigger activation forces, which are typically large forces, such as are generated during launch or impact. The micro mechanical device may be a micro-electrical mechanical system (MEMS) device and the bridge is at least one spring that is part of the MEMS device and also part of the bypass circuit.

    7.
    发明专利
    未知

    公开(公告)号:DE602005000611T2

    公开(公告)日:2007-11-08

    申请号:DE602005000611

    申请日:2005-03-23

    Abstract: A highly reliable fuse for explosives and armaments is achieved by employing a micro mechanical device that operates to disrupt a relatively low impedance bypass circuit coupled in parallel with a relatively high impedance trigger mechanism (101). The removal of the electrical bypassing is performed as a result of the movement of the micro mechanical device to enable detonation under prescribed conditions. The electrical bypassing is removed by having at least one low impedance electrical bridge (105) that is part of the bypass circuit break when the micro mechanical device (103,105) is subjected to prescribed trigger activation forces, which are typically large forces, such as are generated during launch or impact. The micro mechanical device may be a micro-electrical mechanical system (MEMS) device and the bridge is at least one spring that is part of the MEMS device and also part of the bypass circuit.

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