公开(公告)号：JP2002177860A

公开(公告)日：2002-06-25

申请号：JP2001368772

申请日：2001-12-03

Applicant: LUCENT TECHNOLOGIES INC

Inventor： AKSYUK VLADIMIR A ,  BISHOP DAVID J ,  DENK WINFRIED ,  TANK DAVID W

IPC: B05D1/26 ,  B01L3/02 ,  B05C5/00 ,  B05C5/02 ,  B05C9/00 ,  B05C11/00 ,  B05C11/10 ,  B05C11/105 ,  B81C3/00 ,  C09J5/00 ,  C09J163/00

Abstract: PROBLEM TO BE SOLVED: To provide a method for forming a liquid drop having a micrometer size or less. SOLUTION: A micro-pipet having an inner diameter not more than the size of a liquid drop to be formed is connected to a system for applying positive pressure and, according to circumstances, negative pressure to the interior of the micro-pipet. The leading end of the micro-pipe is brought into contact with a liquid. This liquid is sucked into the micro-pipe by capillary action or under the negative pressure applied by the system. Next, the micro-pipet is arranged so as to supply the liquid to the desired position on a surface. Positive pressure is applied to the interior of the micro-pipet in order to supply the liquid. The liquid drop with a micrometer size or less is forcibly discharged from the micro-pipet by the positive pressure. The liquid drop of an adhesive with a micrometer size or less formed by this method is used to fix various members constituting an ultra miniature electromechanical device or ultra miniature mechanical device.

公开(公告)号：JP2000058902A

公开(公告)日：2000-02-25

申请号：JP17027999

申请日：1999-06-16

Applicant: LUCENT TECHNOLOGIES INC

Inventor： DENK WINFRIED ,  LENZ GADI ,  SHMULOVICH JOSEPH ,  XU CHUNHUI

IPC: H01L31/10 ,  H04B10/02 ,  H04B10/43 ,  H04J14/08 ,  H04B10/28

Abstract: PROBLEM TO BE SOLVED: To provide a method in which a time-division multiplexing optical- signal sequence is separated. SOLUTION: In an optical time-division multiplexing system, a waveguide which comprises (m) pieces of electrically insulated photodetectors D1,...Dm is provided, a means 30 by which an optical signal stream containing (m) pieces of interleaved signal sequences is applied to the entrance face of the waveguide is provided, and a means 38 by which optical probe pulses synchronized with the signal stream is applied to the exit face of the waveguide is provided. As a result, the respective probe pulses are overlapped with one set out of different sets of (m) pieces of signals continued inside the waveguide inside the respective photodetectors D1,...Dm, and a nonlinear absorption operation is generated by a two-photon absorption process due to their overlap inside the respective photodetectors D1,...Dm.

公开(公告)号：JPH10332794A

公开(公告)日：1998-12-18

申请号：JP13289498

申请日：1998-05-15

Applicant: LUCENT TECHNOLOGIES INC

Inventor： DENK WINFRIED ,  XU CHUNHUI

IPC: G01R31/302 ,  G01R31/311 ,  H01L21/027 ,  H01L21/66

Abstract: PROBLEM TO BE SOLVED: To accurately form an image by using a beam of light having insufficient photon energy (frequency) for exciting electron between a valence photon belt and an electrically conductive belt (energy gap). SOLUTION: A beam of light 23 of wave length of sufficient strength (non- absorbed frequency) which is ordinarily not absorbed to the base board of a semiconductor device 20, but absorbed by two photon absorption, is output from an irradiation source 21. A scanner 22 focuses and scans the light beam 23 on a semiconductor device 20 buried in a body 201 made of plastics through an objective lens 25. Hereby, electrons in the scanning territory are excited from a valence electron belt to an electrically conductive belt, and a charge carrier and current are generated. Then, an image in the scanning territory is formed based on the current generated on the respective beam positions.

公开(公告)号：JPH10314654A

公开(公告)日：1998-12-02

申请号：JP13289298

申请日：1998-05-15

Applicant: LUCENT TECHNOLOGIES INC

Inventor： AKSYUK VLADIMIR A ,  BISHOP DAVID J ,  DENK WINFRIED ,  TANK DAVID W

IPC: B05D1/26 ,  B01L3/02 ,  B05C5/00 ,  B05C5/02 ,  B05C9/00 ,  B05C11/00 ,  B05C11/10 ,  B05C11/105 ,  B81C3/00 ,  C09J5/00 ,  C09J163/00

Abstract: PROBLEM TO BE SOLVED: To provide a method for forming liquid drops below a micron size. SOLUTION: A micropipette 4 having a bore below the size of the liquid drops to be formed is connected to a system for applying a positive pressure and, in some cases, a negative pressure, on the inside thereof. The front end 6 of such micropipette 4 is brought into contact with the liquid. This liquid is absorbed into the micropipette 4 by capillarity or the negative pressure given by the system described above. Next, this micropipette 4 is so arranged as to supply the liquid to the desired position on the surface. The positive pressure is applied on the inside of the micropipette 4 in order to supply the liquid. The liquid drops below the micron size are forcibly discharged from the micropipette 4 by the positive pressure. Various kinds of the members constituting microminiature electromechanical devices and microminiature mechanical devices are fixed to suitable points by using the liquid drops of the adhesives below the micron size formed by using this method.

公开(公告)号：DE69817438T2

公开(公告)日：2004-06-24

申请号：DE69817438

申请日：1998-05-05

Applicant: LUCENT TECHNOLOGIES INC

Inventor： AKSYUK VLADIMIR A ,  DENK WINFRIED ,  BISHOP DAVID J ,  TANK DAVID W

IPC: B05D1/26 ,  B01L3/02 ,  B05C5/00 ,  B05C5/02 ,  B05C9/00 ,  B05C11/00 ,  B05C11/10 ,  B05C11/105 ,  B81C3/00 ,  C09J5/00 ,  C09J163/00

Abstract: A method for forming micron-sized or smaller drops of liquid, and the use of the method in fabricating micro electro mechanical and micro mechanical devices is disclosed. A micropipette (4) is formed having an inside diameter no larger than the size of the drops to be formed. The micropipette is connected to a system (14) capable of developing a positive and optionally negative pressure within the micropipette. The tip of the micropipette is placed in liquid. The liquid is drawn into the micropipette via capillary action or from the negative pressure developed by the system. The micropipette is then positioned to deliver liquid to an intended location on a surface. To deliver the liquid, a positive pressure is developed within the micropipette (4). The positive pressure forces a micron-sized or smaller drop of liquid out of the micropipette. The method can be used to form micron-sized or smaller drops of adhesive for fixing in place various structural members that form microdevices.

公开(公告)号：DE69830946D1

公开(公告)日：2005-09-01

申请号：DE69830946

申请日：1998-05-05

Applicant: LUCENT TECHNOLOGIES INC

Inventor： DENK WINFRIED ,  XU CHUNHUI

IPC: G01R31/302 ,  G01R31/311 ,  H01L21/027 ,  H01L21/66

Abstract: Semiconductor devices are imaged using two-photon absorption. The method is similar to conventional optical beam induced imaging except that the light beams used have frequencies (f2) (photon energies hf2) insufficient to excite electrons across the semiconductor bandgap (30). Rather the instantaneous intensity of the lower frequency light is increased, as by using a pulsed laser source, so that electron transitions occur by two-photon absorption (35,36) predominately in the localized region where the beam is focused. The result is minimal absorption during passage through the substrate and maximal absorption in the component-rich active layer where the beam is focused. This enhances imaging of fine-detail semiconductor devices. Specifically, the quadratic dependence of free carrier generation on the excitation intensity both enhances the resolution and provides a three-dimensional sectioning capability.

公开(公告)号：DE69830946T2

公开(公告)日：2006-04-20

申请号：DE69830946

申请日：1998-05-05

Applicant: LUCENT TECHNOLOGIES INC

Inventor： DENK WINFRIED ,  XU CHUNHUI

IPC: G01R31/302 ,  H01L21/66 ,  G01R31/311 ,  H01L21/027

Abstract: Semiconductor devices are imaged using two-photon absorption. The method is similar to conventional optical beam induced imaging except that the light beams used have frequencies (f2) (photon energies hf2) insufficient to excite electrons across the semiconductor bandgap (30). Rather the instantaneous intensity of the lower frequency light is increased, as by using a pulsed laser source, so that electron transitions occur by two-photon absorption (35,36) predominately in the localized region where the beam is focused. The result is minimal absorption during passage through the substrate and maximal absorption in the component-rich active layer where the beam is focused. This enhances imaging of fine-detail semiconductor devices. Specifically, the quadratic dependence of free carrier generation on the excitation intensity both enhances the resolution and provides a three-dimensional sectioning capability.

公开(公告)号：DE69817438D1

公开(公告)日：2003-10-02

申请号：DE69817438

申请日：1998-05-05

Applicant: LUCENT TECHNOLOGIES INC

Inventor： AKSYUK VLADIMIR A ,  DENK WINFRIED ,  BISHOP DAVID J ,  TANK DAVID W

IPC: B05D1/26 ,  B01L3/02 ,  B05C5/00 ,  B05C5/02 ,  B05C9/00 ,  B05C11/00 ,  B05C11/10 ,  B05C11/105 ,  B81C3/00 ,  C09J5/00 ,  C09J163/00

Abstract: A method for forming micron-sized or smaller drops of liquid, and the use of the method in fabricating micro electro mechanical and micro mechanical devices is disclosed. A micropipette (4) is formed having an inside diameter no larger than the size of the drops to be formed. The micropipette is connected to a system (14) capable of developing a positive and optionally negative pressure within the micropipette. The tip of the micropipette is placed in liquid. The liquid is drawn into the micropipette via capillary action or from the negative pressure developed by the system. The micropipette is then positioned to deliver liquid to an intended location on a surface. To deliver the liquid, a positive pressure is developed within the micropipette (4). The positive pressure forces a micron-sized or smaller drop of liquid out of the micropipette. The method can be used to form micron-sized or smaller drops of adhesive for fixing in place various structural members that form microdevices.