公开(公告)号：JP2000208705A

公开(公告)日：2000-07-28

申请号：JP2000004534

申请日：2000-01-13

Applicant: LUCENT TECHNOLOGIES INC

Inventor： MERCHANT SAILESH M ,  MINSEOKU OO ,  ROY PRADIP K ,  IU-HYUUEN UON

IPC: H01L27/04 ,  H01L21/02 ,  H01L21/285 ,  H01L21/822 ,  H01L21/8242 ,  H01L27/06 ,  H01L27/108

Abstract: PROBLEM TO BE SOLVED: To provide an MOM constitution having laminated structure of copper/ tantalum nitride/tantalum pentoxide. SOLUTION: A metal-oxide-metal(MOM) capacitor of an integrated circuit is provided with a first electrode, a tantalum pentoxide layer formed on the first electrode, a first barrier layer formed on the tantalum pentoxide layer, and a second copper electrode formed on the first barrier layer. In an embodiment, the first barrier layer of the MOM capacitor is formed of tantalum nitride.