公开(公告)号：JP2001274650A

公开(公告)日：2001-10-05

申请号：JP2001032113

申请日：2001-02-08

Applicant: LUCENT TECHNOLOGIES INC

Inventor： KOWACH GLEN ROBERT

IPC: H01L41/09 ,  H01L41/083 ,  H01L41/18 ,  H01L41/22 ,  H03B5/32 ,  H03H3/02 ,  H03H3/04 ,  H03H3/08 ,  H03H3/10 ,  H03H9/02 ,  H03H9/17

Abstract: PROBLEM TO BE SOLVED: To provide a thin film zinc oxide resonator having higher crystalline performance and orientation without giving any effect on its resistivity and to provide its manufacturing method. SOLUTION: This invention discloses the manufacturing method of the resonator. This method includes a step that provides a substrate base (50) having a dielectric layer. Then an adhesive layer (115) is formed on the dielectric layer and a new creation promoting film (120) is formed on the adhesive layer. Succeedingly a zinc oxide layer (125) is formed on the new creation promoting film and an upper side conductive layer (130) is formed on the zinc oxide layer.

公开(公告)号：CA2336492A1

公开(公告)日：2001-09-15

申请号：CA2336492

申请日：2001-03-01

Applicant: LUCENT TECHNOLOGIES INC

Inventor： SCHNEEMEYER LYNN FRANCES ,  HARTMAN ROBERT LOUIS ,  BYLSMA RICHARD BENDICKS ,  ACKERMAN DAVID ALAN ,  LINES MALCOLM ELLIS ,  KOCH THOMAS LAWSON ,  KOWACH GLEN ROBERT

IPC: G02B6/12 ,  G02B1/02 ,  G02B5/28 ,  G02B6/34 ,  G02B6/42 ,  G02B7/00 ,  G02B26/00 ,  G02F1/01 ,  G02F1/21 ,  H01S5/068 ,  H01S5/125 ,  G02F1/00 ,  H04J14/02 ,  G02F1/29

Abstract: The thermo-optic behavior of an optical path over a range of temperatures .DELTA.T is controlled by determining a figure-of merit (FOM) for the optical path and including in the path a body of crystalline material that enables the conditions specified by the FO M to be satisfied. The crystalline material is highly transparent at a wavelength .lambda. of radiation propagating in the path, and it has a coefficient of thermal expansion (CTE) and a refractive index n such that the CTE and dn/dT are mutually adapted to satisfy the FOM over the range .DELTA.T. In on e embodiment, the CTE and dn/dT of an etalon compensate one another so as to perform frequency discrimination that is essentially temperature insensitive over the range .DELTA.T. In a preferred embodiment of the optical etalon the crystalline material comprises LiCaAlF6.

公开(公告)号：BR0100190A

公开(公告)日：2001-10-09

申请号：BR0100190

申请日：2001-01-29

Applicant: LUCENT TECHNOLOGIES INC

Inventor： KOWACH GLEN ROBERT

IPC: H01L41/09 ,  H01L41/083 ,  H01L41/18 ,  H01L41/22 ,  H03B5/32 ,  H03H3/02 ,  H03H3/04 ,  H03H3/08 ,  H03H3/10 ,  H03H9/02 ,  H03H9/17

Abstract: A method of fabricating a resonator (40) is disclosed. The method initially comprises the step of providing a substrate base (50,65) having a dielectric layer(s) (70-105). Thereafter, an adhesive layer (115) is formed on the dielectric layer(s), and a nucleation promoting film (120) is formed over the adhesive layer. A zinc oxide layer (125) is subsequently formed over the nucleation promoting film, and a top conductive layer (130) is formed over the layer of zinc oxide.

公开(公告)号：AU1830501A

公开(公告)日：2001-08-16

申请号：AU1830501

申请日：2001-02-05

Applicant: LUCENT TECHNOLOGIES INC

Inventor： KOWACH GLEN ROBERT

IPC: H01L41/09 ,  H01L41/083 ,  H01L41/18 ,  H01L41/22 ,  H03B5/32 ,  H03H3/02 ,  H03H3/04 ,  H03H3/08 ,  H03H3/10 ,  H03H9/02 ,  H03H9/17 ,  C23C14/06 ,  C23C14/08 ,  C23C14/18 ,  C23C14/14 ,  C23C14/34

Abstract: A method of fabricating a resonator (40) is disclosed. The method initially comprises the step of providing a substrate base (50,65) having a dielectric layer(s) (70-105). Thereafter, an adhesive layer (115) is formed on the dielectric layer(s), and a nucleation promoting film (120) is formed over the adhesive layer. A zinc oxide layer (125) is subsequently formed over the nucleation promoting film, and a top conductive layer (130) is formed over the layer of zinc oxide.

公开(公告)号：CA2330200A1

公开(公告)日：2001-08-10

申请号：CA2330200

申请日：2001-01-03

Applicant: LUCENT TECHNOLOGIES INC

Inventor： KOWACH GLEN ROBERT

IPC: H01L41/09 ,  H01L41/083 ,  H01L41/18 ,  H01L41/22 ,  H03B5/32 ,  H03H3/02 ,  H03H3/04 ,  H03H3/08 ,  H03H3/10 ,  H03H9/02 ,  H03H9/17 ,  H04R17/10

Abstract: A method of fabricating a resonator is disclosed. The method initially comprises the step of providing a substrate base having a dielectric layer(s ). Thereafter, an adhesive layer is formed on the dielectric layer(s), and a nucleation promoting film is formed over the adhesive layer. A zinc oxide layer is subsequently formed over the nucleation promoting film, and a top conductive layer is formed over the layer of zinc oxide.