METHOD FOR PROCESSING SILICON WORK PIECE USING COMPOSITE TYPE OPTICAL TEMPERATURE MEASUREMENT SYSTEM

    公开(公告)号:JP2000356554A

    公开(公告)日:2000-12-26

    申请号:JP2000104530

    申请日:2000-04-06

    Abstract: PROBLEM TO BE SOLVED: To correctly measure the temperature of a silicon work piece where a process material is present in a wide range including a low temperature by spectrum analyzing ultraviolet beams reflected by the silicon work piece and converting the obtained spectrum data into a temperature value. SOLUTION: A light source 11 of the light reflection type thermometer radiates ultraviolet rays and visible light beams in a wavelength range of 250-550 nm. The radiated light beams and ultraviolet beam 12 through a polariscope 13. A surface 10A of the silicon work piece 10 is irradiated thereon with the beam with an angle of incidence ϕ(ϕ>45 deg.). The reflecting light beam 12 at the surface 10A is corrected by a polariscope 14, and spectrum analyzed by a spectrum analysis apparatus 15 having an optical grating diffusion element 16 and a silicon photo detector 17, so that spectrum data is obtained. The obtained spectrum data is converted into a temperature value. Information on the temperature value is sent to an electronic circuit or heating element, thereby controlling a temperature. The temperature of the silicon work piece 10 when a process material is applied or the like can be correctly measured accordingly.

    METHOD AND DEVICE FOR UPDATING RECORD OF DATA BASE SYSTEM BASED ON MODEL IN WHICH TIME-DEPENDENT BEHAVIOR IS IMPROVED

    公开(公告)号:JP2001356944A

    公开(公告)日:2001-12-26

    申请号:JP2001104704

    申请日:2001-04-03

    Abstract: PROBLEM TO BE SOLVED: To provide improved technology to update customer's signature or other types of records in a data base system. SOLUTION: The customer's signature or other types of records are updated by using event driving type estimation quantity based on a model of a time- dependent behavior in the data base system. In a preferable form of embodiment, the latest version of a record to be affected by prescribed transaction is retrieved from a memory of the system, the event driving type estimation quantity of at least one of transaction rate and period probability to the record are determined at least partially based on a dynamic Poisson timing model having the transaction rate on the basis of period corresponding to many related periods. The event driving type estimation quantity is allowed to be constituted so as to generate an estimated transaction rate λjin for a period j and a prescribed transaction n and after that to generate an estimated period probability λjm/Σkλkm for the period j setting πj,n. And an updated version of the record is allowed to be generated based on the event driving type estimation quantity.

    METHOD FOR CONSTRUCTING AN UPDATEABLE DATABASE OF SUBJECT BEHAVIOR PATTERNS
    5.
    发明申请
    METHOD FOR CONSTRUCTING AN UPDATEABLE DATABASE OF SUBJECT BEHAVIOR PATTERNS 审中-公开
    用于构建主体行为模式的可更新数据库的方法

    公开(公告)号:WO0073877A8

    公开(公告)日:2001-11-22

    申请号:PCT/US0015082

    申请日:2000-05-31

    CPC classification number: G06Q40/08 H04M3/51

    Abstract: L'invention concerne un procédé permettant de mettre à jour des descriptions compactes du comportement de clients dans une base de données d'informations concernant les transactions des clients. Parmi toutes les variables qu'il est possible d'utiliser pour caractériser les transactions des clients, on en a sélectionnées un nombre restreint sur la base du pouvoir discriminatif propre à définir les profils des clients. Les clients sont classés conformément aux traits caractéristiques de leurs profils. Un nouveau client peut être initialement associé à une classe spécifique en fonction des données qui caractérisent quelques-unes de ses premières transactions.

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